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International application No. Applicant's or agent's file reference
PCT/US2019/062965 9511-1WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
25 November 2019 30 November 2018
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     11    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     H01L 27/108 (2006.01)i; H01L 21/66 (2006.01)i; H01L 21/768 (2006.01)i; H01L 21/324 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: deposition, nucleation, grain, dending, word, line


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
US 2018-0053660 A1 (LAM RESEARCH CORPORATION) 22 February 2018 paragraphs [0064]-[0096] and figures 4A-4D
WO 2016-085569 A1 (SANDISK TECHNOLOGIES, INC.) 02 June 2016 paragraphs [0052]-[0054], claims 1-11 and figures 9A-9C
US 2014-0030889 A1 (FENG CHEN et al.) 30 January 2014 paragraphs [0027]-[0030] and figures 1A-1B
US 2016-0118345 A1 (NOVELLUS SYSTEMS, INC.) 28 April 2016 paragraphs [0031]-[0044] and figure 3
US 2014-0106083 A1 (APPLIED MATERIALS, INC.) 17 April 2014 paragraphs [0018]-[0042] and figures 1-3C
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
document cited by the applicant in the international application
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
US 2018-0053660 A1
22 February 2018
CN 107768304 A
KR 10-2018-0019487 A
TW 201818458 A
US 10573522 B2
06 March 2018
26 February 2018
16 May 2018
25 February 2020
WO 2016-085569 A1
02 June 2016
EP 3224863 A1
EP 3224863 B1
US 2016-0148945 A1
US 9570455 B2
04 October 2017
29 January 2020
26 May 2016
14 February 2017
US 2014-0030889 A1
30 January 2014
KR 10-2014-0014024 A
TW 201413031 A
TW I604081 B
US 8975184 B2
05 February 2014
01 April 2014
01 November 2017
10 March 2015
US 2016-0118345 A1
28 April 2016
CN 104752339 A
CN 104752339 B
CN 110310919 A
JP 5700327 B2
JP 5791167 B2
JP 2010-251759 A
JP 2010-251760 A
KR 10-1383384 B1
KR 10-1495372 B1
KR 10-1642917 B1
KR 10-2010-0114855 A
KR 10-2010-0114856 A
KR 10-2014-0096253 A
KR 10-2015-0077376 A
TW 201118948 A
TW 201120959 A
TW 201526090 A
TW 201643963 A
TW I529806 B
TW I536458 B
TW I623040 B
US 2010-0267230 A1
US 2010-0267235 A1
US 2014-0154883 A1
US 2014-0162451 A1
US 8623733 B2
US 9159571 B2
US 9236297 B2
US 9673146 B2
01 July 2015
18 June 2019
08 October 2019
15 April 2015
07 October 2015
04 November 2010
04 November 2010
08 April 2014
24 February 2015
26 July 2016
26 October 2010
26 October 2010
05 August 2014
07 July 2015
01 June 2011
16 June 2011
01 July 2015
16 December 2016
11 April 2016
01 June 2016
01 May 2018
21 October 2010
21 October 2010
05 June 2014
12 June 2014
07 January 2014
13 October 2015
12 January 2016
06 June 2017
US 2014-0106083 A1
17 April 2014
CN 104813444 A
CN 104813444 B
CN 108538715 A
KR 10-2015-0063562 A
TW 201416480 A
TW 201835368 A
TW I623643 B
US 9169556 B2
WO 2014-058536 A1
29 July 2015
20 April 2018
14 September 2018
09 June 2015
01 May 2014
01 October 2018
11 May 2018
27 October 2015
17 April 2014
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
13 March 2020
Date of mailing of the international search report:
13 March 2020
Authorized officer:
KANG, Sung Chul
Telephone No. +82-42-481-8405
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