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1. WO2020112266 - NANOSTRUCTURES FOR OPTICAL DEVICES

Publication Number WO/2020/112266
Publication Date 04.06.2020
International Application No. PCT/US2019/056434
International Filing Date 16.10.2019
IPC
G02B 1/04 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made; Optical coatings for optical elements
04made of organic materials, e.g. plastics
CPC
B82Y 20/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
20Nanooptics, e.g. quantum optics or photonic crystals
G02B 1/002
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1Optical elements characterised by the material of which they are made
002made of materials engineered to provide properties not available in nature, e.g. metamaterials
G02F 1/0102
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
0102Constructional details
G02F 2202/30
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
2202Materials and properties
30Metamaterials
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • ROY, Tapashree
  • MCMILLAN, Wayne
  • MEYER TIMMERMAN THIJSSEN, Rutger
Agents
  • TABOADA, Keith
  • VER STEEG, Steven H.
Priority Data
62/771,95227.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NANOSTRUCTURES FOR OPTICAL DEVICES
(FR) NANOSTRUCTURES POUR DISPOSITIFS OPTIQUES
Abstract
(EN)
Embodiments of metasurfaces having nanostructures with desired geometric profiles and configurations are provided in the present disclosure. In one embodiment, a metasurface includes a nanostructure formed on a substrate, wherein the nanostructure is cuboidal or cylindrical in shape. In another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein each of the nanostructures has a gap greater than 35 nm spaced apart from each other. In yet another embodiment, a metasurface includes a plurality of nanostructures on a substrate, wherein the nanostructures are fabricated from at least one of TiO2, silicon nitride, or amorphous silicon, or GaN or aluminum zinc oxide or any material with refractive index greater than 1.8, and absorption coefficient smaller than 0.001, the substrate is transparent with absorption coefficient smaller than 0.001.
(FR)
La présente invention décrit des modes de réalisation de métasurfaces ayant des nanostructures avec des profils géométriques et des configurations souhaités. Dans un mode de réalisation, une métasurface comprend une nanostructure formée sur un substrat, la nanostructure étant cubique ou cylindrique. Dans un autre mode de réalisation, une métasurface comprend une pluralité de nanostructures sur un substrat, chacune des nanostructures ayant un écart supérieur à 35 nm l'une de l'autre. Dans un autre mode de réalisation, une métasurface comprend une pluralité de nanostructures sur un substrat, les nanostructures étant fabriquées à partir d'au moins un élément parmi le TiO2, le nitrure de silicium, le silicium amorphe, le GaN, l'oxyde de zinc d'aluminium ou tout matériau ayant un indice de réfraction supérieur à 1,8 et un coefficient d'absorption inférieur à 0,001, le substrat est transparent avec un coefficient d'absorption inférieur à 0,001.
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