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1. WO2020112230 - SILICON PHOTOMULTIPLIER LIGHT DETECTION AND MEASUREMENT SYSTEM AND METHOD FOR COOLING THE SAME

Publication Number WO/2020/112230
Publication Date 04.06.2020
International Application No. PCT/US2019/053338
International Filing Date 27.09.2019
IPC
H01J 37/244 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
244Detectors; Associated components or circuits therefor
H01J 37/252 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
252Tubes for spot-analysing by electron or ion beams; Microanalysers
G01J 3/02 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
CPC
G01J 3/02
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
H01J 37/244
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
244Detectors; Associated components or circuits therefor
H01J 37/252
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
252Tubes for spot-analysing by electron or ion beams; Microanalysers
Applicants
  • TEMPLE UNIVERSITY-OF THE COMMONWEALTH SYSTEM OF HIGHER EDUCATION [US]/[US]
Inventors
  • MARTOFF, C.J.
  • JONES, Donald
  • PONENTO, Andrew
Agents
  • NIGON, Philip, D.
  • ALLEN, Justin
  • ALLEN, Scott, E.
  • ARTIS, Ryan
  • CHEN, Ming
Priority Data
62/737,53727.09.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SILICON PHOTOMULTIPLIER LIGHT DETECTION AND MEASUREMENT SYSTEM AND METHOD FOR COOLING THE SAME
(FR) SYSTÈME DE DÉTECTION ET DE MESURE DE LUMIÈRE À PHOTOMULTIPLICATEUR AU SILICIUM ET SON PROCÉDÉ DE REFROIDISSEMENT
Abstract
(EN)
A light detection and measurement device comprises a silicon photomultiplier, at least one thermoelectric cooler thermally coupled to the silicon photomultiplier, a sealed enclosure surrounding the silicon photomultiplier and the at least one thermoelectric cooler, the enclosure including a substantially transparent window thermally coupled to the silicon photomultiplier, and a heat sinking device thermally coupled to the enclosure configured to remove waste heat. A method of cooling a silicon photomultiplier is also described.
(FR)
Un dispositif de détection et de mesure de lumière comprend un photomultiplicateur au silicium, au moins un refroidisseur thermoélectrique couplé thermiquement au photomultiplicateur au silicium, une enceinte scellée entourant le photomultiplicateur au silicium et le ou les refroidisseurs thermoélectriques, l'enceinte comprenant une fenêtre sensiblement transparente couplée thermiquement au photomultiplicateur au silicium, et un dispositif de dissipation de chaleur couplé thermiquement à l'enceinte configuré pour éliminer la chaleur résiduelle. L'invention concerne également un procédé de refroidissement d'un photomultiplicateur au silicium.
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