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1. WO2020111430 - OPTICAL MEASUREMENT DEVICE, CHEMICAL SUBSTANCE SUPPLY DEVICE COMPRISING OPTICAL MEASUREMENT DEVICE, AND PROCESS DEVICE USING CHEMICAL SUBSTANCE COMPRISING OPTICAL MEASUREMENT DEVICE

Publication Number WO/2020/111430
Publication Date 04.06.2020
International Application No. PCT/KR2019/008439
International Filing Date 09.07.2019
IPC
G01N 21/43 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
43by measuring critical angle
G01N 21/27 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
CPC
G01N 21/27
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
G01N 21/43
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
41Refractivity; Phase-affecting properties, e.g. optical path length
43by measuring critical angle
Applicants
  • 조해연 CHO, Haeyeon [KR]/[KR]
Inventors
  • 조해연 CHO, Haeyeon
Agents
  • 박상환 PARK, Sang-Hwan
Priority Data
10-2018-014788526.11.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) OPTICAL MEASUREMENT DEVICE, CHEMICAL SUBSTANCE SUPPLY DEVICE COMPRISING OPTICAL MEASUREMENT DEVICE, AND PROCESS DEVICE USING CHEMICAL SUBSTANCE COMPRISING OPTICAL MEASUREMENT DEVICE
(FR) DISPOSITIF DE MESURE OPTIQUE, DISPOSITIF D'ALIMENTATION EN SUBSTANCE CHIMIQUE COMPRENANT LE DISPOSITIF DE MESURE OPTIQUE, ET DISPOSITIF DE TRAITEMENT UTILISANT UNE SUBSTANCE CHIMIQUE COMPRENANT LE DISPOSITIF DE MESURE OPTIQUE
(KO) 광학 측정 장치, 광학 측정 장치를 포함하는 화학물질 공급 장치 및 광학 측정 장치를 포함하는 화학물질을 이용하는 공정 장치
Abstract
(EN)
The present invention relates to an optical measurement device, a chemical substance supply device comprising the optical measurement device, and a process device using a chemical substance comprising the optical measurement device. An optical measurement device according to an embodiment of the present invention comprises: a light source; a transmission unit comprising a body, a first surface which is one of the outer surfaces of the body, a second surface opposite the first surface, an incident surface to which light emitted from the light source is incident inside the body, a contact surface disposed on the first surface and in contact with the sample, and an emission surface disposed on the second surface and through which light incident to the body is emitted outside; and a detection unit for receiving light emitted from the transmission unit, wherein D1, which is the shortest distance between a central portion of the incident surface and the first surface, and D2, which is the shortest distance between the emission surface and the first surface, satisfy D1 < D2.
(FR)
La présente invention concerne un dispositif de mesure optique, un dispositif d'alimentation en substance chimique comprenant le dispositif de mesure optique, et un dispositif de traitement utilisant une substance chimique comprenant le dispositif de mesure optique. Un dispositif de mesure optique selon un mode de réalisation de la présente invention comprend : une source de lumière ; une unité de transmission comprenant un corps, une première surface qui est l'une des surfaces externes du corps, une seconde surface opposée à la première surface, une surface d'incidence sur laquelle la lumière émise par la source de lumière est incidente à l'intérieur du corps, une surface de contact disposée sur la première surface et en contact avec l'échantillon, et une surface d'émission disposée sur la seconde surface et à travers laquelle la lumière incidente sur le corps est émise vers l'extérieur ; et une unité de détection pour recevoir la lumière émise par l'unité de transmission, D1, qui est la distance la plus courte entre une partie centrale de la surface d'incidence et la première surface, et D2, qui est la distance la plus courte entre la surface d'émission et la première surface, satisfaisant à l'inégalité D1 < D2.
(KO)
본 발명은 광학 측정 장치, 광학 측정 장치를 포함하는 화학물질 공급 장치 및 광학 측정 장치를 포함하는 화학물질을 이용하는 공정 장치에 관한 것으로, 본 발명의 실시 예를 따르는 광학 측정 장치는, 광원; 몸체, 상기 몸체의 외부면 중 하나인 제1 면, 상기 제1 면에 대향하는 제2 면, 상기 광원에서 방출된 빛이 상기 몸체의 내부로 입사하는 입사면, 상기 제1 면 상에 배치되고 상기 시료와 접촉하는 접촉면, 및 상기 제2 면 상에 배치되고 상기 몸체로 입사된 빛이 외부로 방출되는 방출면,을 포함하는 투과부; 및 상기 투과부에서 방출된 빛을 수광하는 검출부;를 포함하고, 상기 입사면의 중심부 및 제1 면 사이의 최단 거리 D1, 및 상기 방출면 및 제1 면 사이의 최단 거리 D2는, D1 < D2을 만족한다.
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