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1. WO2020111194 - SAMPLE HOLDER

Publication Number WO/2020/111194
Publication Date 04.06.2020
International Application No. PCT/JP2019/046640
International Filing Date 28.11.2019
IPC
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
CPC
H01L 21/683
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
Applicants
  • 京セラ株式会社 KYOCERA CORPORATION [JP]/[JP]
Inventors
  • 竹森 啓真 TAKEMORI, Hiromasa
Agents
  • 西教 圭一郎 SAIKYO, Keiichiro
Priority Data
2018-22512930.11.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SAMPLE HOLDER
(FR) PORTE-ÉCHANTILLON
(JA) 試料保持具
Abstract
(EN)
An objective of the present invention is to provide a sample holder with which thermal stress arising between an insulating sleeve and a metal support body can be reduced. This sample holder comprises an insulation substrate 1 comprising a sample holding surface and a support body 2 which is joined to the insulation substrate 1. A through hole 9 which is provided in the insulation substrate 1 and a hole part 7 which is provided in the support body 2 are connected and define a gas inflow hole. In the hole part 7, a cylindrical sleeve 10 is provided, and a ring-shaped member 4 is provided between an outer circumference surface 10a of the sleeve 10 and an inner circumference surface 7a of the hole part 7. The ring-shaped member 4 surrounds the sleeve 10 and anchors the sleeve 10 to the support body 2.
(FR)
Un objectif de la présente invention est de fournir un porte-échantillon avec lequel une contrainte thermique survenant entre un manchon isolant et un corps de support métallique peut être réduite. Ce porte-échantillon comprend un substrat d'isolation 1 comprenant une surface de maintien d'échantillon et un corps de support 2 qui est relié au substrat d'isolation 1. Un trou traversant 9 qui est disposé dans le substrat d'isolation 1 et une partie de trou 7 qui est disposée dans le corps de support 2 sont reliés et définissent un trou d'entrée de gaz. Dans la partie de trou 7, un manchon cylindrique 10 est prévu, et un élément en forme d'anneau 4 est disposé entre une surface de circonférence externe 10a du manchon 10 et une surface de circonférence interne 7a de la partie de trou 7. L'élément en forme d'anneau 4 entoure le manchon 10 et ancre le manchon 10 au corps de support 2.
(JA)
絶縁スリーブと金属支持体との間に発生する熱応力を低減できる試料保持具を提供すること。試料保持具は、試料保持面を有する絶縁基体1と、絶縁基体1に接合された支持体2とを備えており、絶縁基体1に設けられた貫通孔9と支持体2に設けられた孔部7とが連通してガス流入孔を構成している。孔部7内には筒状のスリーブ10が配置されており、スリーブ10の外周面10aと孔部7の内周面7aとの間に位置する環状部材4を設けている。環状部材4は、スリーブ10を囲み、スリーブ10を支持体2に固定している。
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