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1. WO2020110711 - INSPECTION SYSTEM, INSPECTION METHOD, AND PROGRAM

Publication Number WO/2020/110711
Publication Date 04.06.2020
International Application No. PCT/JP2019/044387
International Filing Date 12.11.2019
IPC
G03B 15/00 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
15Special procedures for taking photographs; Apparatus therefor
G02B 7/28 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
7Mountings, adjusting means, or light-tight connections, for optical elements
28Systems for automatic generation of focusing signals
G02B 7/36 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
7Mountings, adjusting means, or light-tight connections, for optical elements
28Systems for automatic generation of focusing signals
36using image sharpness techniques
G03B 13/36 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
13Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
32Means for focusing
34Power focusing
36Autofocus systems
G01N 21/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
H04N 5/232 2006.01
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
5Details of television systems
222Studio circuitry; Studio devices; Studio equipment
225Television cameras
232Devices for controlling television cameras, e.g. remote control
CPC
G01N 21/88
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
G02B 7/28
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
7Mountings, adjusting means, or light-tight connections, for optical elements
28Systems for automatic generation of focusing signals
G02B 7/36
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
7Mountings, adjusting means, or light-tight connections, for optical elements
28Systems for automatic generation of focusing signals
36using image sharpness techniques ; , e.g. image processing techniques for generating autofocus signals
G03B 13/36
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
13Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
32Means for focusing
34Power focusing
36Autofocus systems
G03B 15/00
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
15Special procedures for taking photographs; Apparatus therefor
H04N 5/232
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
5Details of television systems
222Studio circuitry; Studio devices; Studio equipment ; ; Cameras comprising an electronic image sensor, e.g. digital cameras, video cameras, TV cameras, video cameras, camcorders, webcams, camera modules for embedding in other devices, e.g. mobile phones, computers or vehicles
225Television cameras ; ; Cameras comprising an electronic image sensor, e.g. digital cameras, video cameras, camcorders, webcams, camera modules specially adapted for being embedded in other devices, e.g. mobile phones, computers or vehicles
232Devices for controlling television cameras, e.g. remote control ; ; Control of cameras comprising an electronic image sensor;
Applicants
  • オムロン株式会社 OMRON CORPORATION [JP]/[JP]
Inventors
  • 山内 佑二 YAMAUCHI, Yuji
  • 加藤 豊 KATO, Yutaka
Agents
  • 特許業務法人深見特許事務所 FUKAMI PATENT OFFICE, P.C.
Priority Data
2018-22107027.11.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) INSPECTION SYSTEM, INSPECTION METHOD, AND PROGRAM
(FR) SYSTÈME D'INSPECTION, PROCÉDÉ D'INSPECTION ET PROGRAMME
(JA) 検査システム、検査方法およびプログラム
Abstract
(EN)
This inspection system comprises: an optical system having a variable focal point; an imaging element for generating an image due to reception of light from an object through the optical system; a focus adjustment unit for adjusting a focal point; an inspection unit for inspecting the object on the basis of a first region in an inspection image generated when a focal point is adjusted by the focus adjustment unit, and outputting the inspection results; and an assessment unit for assessing the reliability of focus on a site subject to inspection in the object on the basis of a second region in the inspection image, and outputting the assessment results. Accordingly, the risk of overlooking a defect in an object can be reduced.
(FR)
La présente invention concerne un système d'inspection comprenant : un système optique ayant un point focal variable ; un élément d'imagerie pour générer une image en raison de la réception de lumière provenant d'un objet à travers le système optique ; une unité de mise au point pour ajuster un point focal ; une unité d'inspection pour inspecter l'objet sur la base d'une première région dans une image d'inspection générée lorsqu'un point focal est ajusté par l'unité de mise au point, et fournir les résultats d'inspection ; et une unité d'évaluation pour évaluer la fiabilité de focalisation sur un site sujet à une inspection dans l'objet sur la base d'une seconde région dans l'image d'inspection, et fournir les résultats d'évaluation. En conséquence, le risque de négligence d'un défaut dans un objet peut être réduit.
(JA)
検査システムは、焦点位置が可変である光学系と、光学系を介して対象物からの光を受けることによって画像を生成する撮像素子と、焦点位置を調節するフォーカス調節部と、フォーカス調節部によって焦点位置が調節されたときに生成された検査画像のうちの第1領域に基づいて対象物を検査し、検査結果を出力する検査部と、検査画像のうちの第2領域に基づいて、対象物の検査対象箇所に対する合焦の信頼性を評価し、評価結果を出力する評価部とを備える。これにより、対象物の不良の見逃しのリスクを低減できる。
Also published as
Latest bibliographic data on file with the International Bureau