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1. WO2020110197 - DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

Publication Number WO/2020/110197
Publication Date 04.06.2020
International Application No. PCT/JP2018/043562
International Filing Date 27.11.2018
IPC
G01N 29/06 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
06Visualisation of the interior, e.g. acoustic microscopy
G01N 29/24 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
CPC
G01N 29/06
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
06Visualisation of the interior, e.g. acoustic microscopy
G01N 29/24
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
24Probes
Applicants
  • 株式会社島津製作所 SHIMADZU CORPORATION [JP]/[JP]
Inventors
  • 吉田 康紀 YOSHIDA, Koki
  • 畠堀 貴秀 HATAHORI, Takahide
  • 田窪 健二 TAKUBO, Kenji
Agents
  • 宮園 博一 MIYAZONO, Hirokazu
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
(FR) APPAREIL DE RECHERCHE DE DÉFAUTS ET PROCÉDÉ DE RECHERCHE DE DÉFAUTS
(JA) 欠陥検査装置および欠陥検査方法
Abstract
(EN)
This defect inspection apparatus (100) is provided with: an excitation unit (1); a laser illumination unit (2); an interference unit (3) for causing laser light to interfere; an imaging unit (35) for imaging interfered reflected light; and a control unit (4) for measuring the spatial distribution of a periodically varying physical quantity arising from propagation of vibration of an inspection object on the basis of the interfered reflected light imaged by the imaging unit, and extracting a discontinuous portion of the vibration on the basis of the spatial distribution of the physical quantity. The control unit is configured so as to perform control for displaying the extracted discontinuous portion of the vibration so as to be emphasized and superposed on a static image of the inspection object imaged by the imaging unit.
(FR)
L'appareil de recherche de défauts (100) selon la présente invention comprend : une unité d'excitation (1) ; une unité d'éclairage laser (2) ; une unité d'interférence (3) pour amener la lumière laser à interférer ; une unité d'imagerie (35) pour imager une lumière d'interférence réfléchie ; et une unité de commande (4) pour mesurer la distribution spatiale d'une quantité physique variant périodiquement issue de la propagation de la vibration d'un objet à inspecter sur la base de la lumière d'interférence réfléchie imagée par l'unité d'imagerie, et extraire une partie discontinue de la vibration sur la base de la distribution spatiale de la quantité physique. L'unité de commande est conçue pour commander un affichage accentué et superposé de la partie discontinue extraite de la vibration sur une image statique de l'objet à inspecter imagé par l'unité d'imagerie.
(JA)
この欠陥検査装置(100)は、励振部(1)と、レーザ照明(2)と、レーザ光を干渉させる干渉部(3)と、干渉された反射光を撮像する撮像部(35)と、撮像部により撮像した干渉された反射光に基づいて、検査対象の振動の伝播により生じる、周期的に変化する物理量の空間分布を測定するとともに、物理量の空間分布に基づいて、振動の不連続部分を抽出する制御部(4)と、を備える。制御部は、撮像部により撮像した検査対象の静止画像に、抽出した振動の不連続部分を強調して重ねて表示する制御を行うように構成されている。
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