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1. WO2020110177 - LASER SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Publication Number WO/2020/110177
Publication Date 04.06.2020
International Application No. PCT/JP2018/043433
International Filing Date 26.11.2018
IPC
G02F 1/37 2006.01
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
H01S 3/10 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
CPC
G02F 1/37
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
H01S 3/10
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
Applicants
  • ギガフォトン株式会社 GIGAPHOTON INC. [JP]/[JP]
Inventors
  • 三浦 泰祐 MIURA, Taisuke
  • 小野瀬 貴士 ONOSE, Takashi
  • 若林 理 WAKABAYASHI, Osamu
Agents
  • 松浦 憲三 MATSUURA, Kenzo
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) LASER SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
(FR) SYSTÈME LASER ET PROCÉDÉ DE FABRICATION DE DISPOSITIF ÉLECTRONIQUE
(JA) レーザシステム、及び電子デバイスの製造方法
Abstract
(EN)
A laser system according to an aspect of the present invention is provided with: a wavelength-variable first solid laser device that outputs a first pulse laser beam; a wavelength conversion system that converts the wavelength of the first pulse laser beam; an excimer amplifier that amplifies the pulse laser beam the wavelength of which has been converted by the wavelength conversion system; and a control unit. The wavelength conversion system includes a first nonlinear crystal into which the first pulse laser beam enters, and a first rotation stage for changing the first entering angle of the first pulse laser beam to the first nonlinear crystal. The control unit receives, from an external device, data on the target center wavelength of an excimer laser beam outputted from the excimer amplifier, controls the wavelength of the first pulse laser beam on the basis of the instructed target center wavelength, and controls the first entering angle to the first nonlinear crystal on the basis of the average value of the target center wavelength.
(FR)
Selon un aspect de la présente invention, un système laser comprend : un premier dispositif laser solide à longueur d'onde variable qui émet un premier faisceau laser à impulsions ; un système de conversion de longueur d'onde qui convertit la longueur d'onde du premier faisceau laser à impulsions ; un amplificateur à excimères qui amplifie le faisceau laser à impulsions dont la longueur d'onde a été convertie par le système de conversion de longueur d'onde ; et une unité de commande. Le système de conversion de longueur d'onde comprend un premier cristal non linéaire dans lequel le premier faisceau laser à impulsions entre, et une première étape de rotation pour modifier le premier angle d'entrée du premier faisceau laser à impulsions vers le premier cristal non linéaire. L'unité de commande reçoit, en provenance d'un dispositif externe, des données sur la longueur d'onde centrale cible d'un faisceau laser à excimères émis par l'amplificateur à excimères. L'unité commande la longueur d'onde du premier faisceau laser à impulsions sur la base de la longueur d'onde centrale cible ordonnée, et commande le premier angle d'entrée par rapport au premier cristal non linéaire sur la base de la valeur moyenne de la longueur d'onde centrale cible.
(JA)
本開示の一観点に係るレーザシステムは、第1のパルスレーザ光を出力する波長可変な第1の固体レーザ装置と、第1のパルスレーザ光を波長変換する波長変換システムと、波長変換システムによって波長変換されたパルスレーザ光を増幅するエキシマ増幅器と、制御部と、を備える。波長変換システムは第1のパルスレーザ光が入射する第1の非線形結晶と、第1の非線形結晶への第1のパルスレーザ光の第1の入射角度を変化させる第1の回転ステージと、を含む。制御部は、エキシマ増幅器から出力されるエキシマレーザ光の目標中心波長のデータを外部装置から受信し、指令された目標中心波長に基づいて第1のパルスレーザ光の波長を制御し、かつ、目標中心波長の平均値に基づいて第1の非線形結晶への前記第1の入射角度を制御する。
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