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1. WO2020110055 - METHOD AND APPARATUS FOR CO-DEPOSITION OF MATERIALS

Publication Number WO/2020/110055
Publication Date 04.06.2020
International Application No. PCT/IB2019/060265
International Filing Date 28.11.2019
IPC
B05D 1/38 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
1Processes for applying liquids or other fluent materials
36Successively applying liquids or other fluent materials, e.g. without intermediate treatment
38with intermediate treatment
B05D 3/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
3Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
04by exposure to gases
C23C 14/24 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
CPC
B05D 1/38
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
1Processes for applying liquids or other fluent materials
36Successively applying liquids or other fluent materials, e.g. without intermediate treatment
38with intermediate treatment
B05D 3/04
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
3Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
04by exposure to gases
C23C 14/24
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • OTI LUMIONICS INC. [CA]/[CA]
  • HELANDER, Michael [CA]/[CA]
  • WANG, Zhibin [CA]/[CA]
Inventors
  • WANG, Zhibin
Priority Data
62/774,03630.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD AND APPARATUS FOR CO-DEPOSITION OF MATERIALS
(FR) PROCÉDÉ ET APPAREIL DE DÉPÔT SIMULTANÉ DE MATÉRIAUX
Abstract
(EN)
A method for depositing a coating including a first material and a second material onto a surface of a substrate is provided. The method includes: (i) evaporating a first material and a second material to generate a vapor flux; and (ii) exposing the surface of the substrate to the vapor flux to deposit the coating, wherein a first flux portion of the vapor flux comprises a first flux composition, and a second flux portion of the vapor flux comprises a second flux composition. The first flux composition is different from the second flux composition.
(FR)
L'invention concerne un procédé de dépôt d'un revêtement comportant un premier matériau et un second matériau sur une surface d'un substrat. Le procédé consiste : (I) à évaporer un premier matériau et un second matériau en vue de générer un flux de vapeur ; et (ii) à exposer la surface du substrat au flux de vapeur en vue de déposer le revêtement, une première partie de flux du flux de vapeur comprenant une première composition de flux, et une seconde partie de flux du flux de vapeur comprenant une seconde composition de flux. La première composition de flux est différente de la seconde composition de flux.
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