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1. WO2020109790 - MUTIPLE CHAMBER VACUUM EXHAUST SYSTEM

Publication Number WO/2020/109790
Publication Date 04.06.2020
International Application No. PCT/GB2019/053352
International Filing Date 27.11.2019
IPC
F04B 37/14 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/-F04B35/187
10for special use
14to obtain high vacuum
F04B 41/06 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
41Pumping installations or systems specially adapted for elastic fluids
06Combinations of two or more pumps
F04D 19/04 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps specially adapted for elastic fluids
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
CPC
F04B 37/14
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
10for special use
14to obtain high vacuum
F04B 41/06
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
41Pumping installations or systems specially adapted for elastic fluids
06Combinations of two or more pumps
F04D 13/12
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
13Pumping installations or systems
12Combinations of two or more pumps
F04D 19/042
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
042Turbomolecular vacuum pumps
F04D 25/16
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
25Pumping installations or systems
16Combinations of two or more pumps ; Producing two or more separate gas flows
F04D 27/005
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
27Control, e.g. regulation, of pumps, pumping installations or systems
005by changing flow path between different stages or between a plurality of compressors; Load distribution between compressors
Applicants
  • EDWARDS LIMITED [GB]/[GB]
Inventors
  • SCHOFIELD, Nigel Paul
  • BAILEY, Christopher Mark
  • GALTRY, Michael Andrew
  • MANN, Andrew David
Agents
  • NORTON, Ian
Priority Data
1819351.628.11.2018GB
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MUTIPLE CHAMBER VACUUM EXHAUST SYSTEM
(FR) SYSTÈME D'ÉVACUATION SOUS VIDE DE MULTIPLES CHAMBRES
Abstract
(EN)
A vacuum exhaust system for evacuating a plurality of vacuum chambers is disclosed. The vacuum exhaust system comprises: a plurality of low pressure vacuum pumps configured to operate in the molecular flow region of the gas and configured for evacuating the plurality of vacuum chambers; a plurality of chamber valves for isolating or connecting the plurality of low pressure vacuum pumps with the plurality of vacuum chambers; a plurality of branch channels each connected to a corresponding exhaust of the plurality of low pressure vacuum pumps; a main channel formed from a confluence of the branch channels and configured to provide a fluid communication path between the plurality of branch channels and an intermediate pressure vacuum pump. The intermediate vacuum pump is configured to evacuate the main channel and to operate in a viscous flow region of the gas. There is a higher pressure vacuum pump configured to operate in a higher pressure viscous flow region of the gas than the intermediate pressure vacuum pump the higher pressure vacuum pump being connected to an exhaust of the intermediate pressure vacuum pump. There are also a plurality of bypass channels for providing a fluid communication path between at least some of the plurality of vacuum chambers and a higher pressure vacuum pump; wherein the plurality of bypass channels each comprise a valve configured to open or close the bypass channel.
(FR)
L'invention concerne un système d'évacuation sous vide pour évacuer une pluralité de chambres sous vide. Le système d'évacuation sous vide comprend : une pluralité de pompes à vide à basse pression configurées pour fonctionner dans la région d'écoulement moléculaire du gaz et configurées pour évacuer la pluralité de chambres sous vide ; une pluralité de vannes de chambre pour isoler ou connecter la pluralité de pompes à vide à basse pression à la pluralité de chambres sous vide ; une pluralité de canaux de dérivation reliés chacun à un échappement correspondant de la pluralité de pompes à vide à basse pression ; un canal principal formé à partir d'une confluence des canaux de dérivation et configuré pour fournir un trajet de communication fluidique entre la pluralité de canaux de dérivation et une pompe à vide à pression intermédiaire. La pompe à vide intermédiaire est configurée pour évacuer le canal principal et pour fonctionner dans une région à écoulement visqueux du gaz. Une pompe à vide à haute pression est configurée pour fonctionner dans une région à écoulement visqueux du gaz à plus haute pression que la pompe à vide à pression intermédiaire, la pompe à vide à haute pression étant reliée à un échappement de la pompe à vide à pression intermédiaire. Une pluralité de canaux de dérivation est également prévue pour fournir un trajet de communication fluidique entre au moins une partie de la pluralité de chambres sous vide et une pompe à vide à haute pression ; la pluralité de canaux de dérivation comprenant chacun une soupape configurée pour ouvrir ou fermer le canal de dérivation.
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