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1. WO2020109753 - FABRICATION OF CORRELATED ELECTRON MATERIAL (CEM) DEVICES


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/GB2019/053257 P00621WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
15 November 2019 30 November 2018
Applicant
ARM LIMITED
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.

Subject matter disclosed herein relates to fabrication of a correlated electron material (CEM) switch (302). In particular embodiments a method include forming a structure (160, 170, 180) on a first portion of a substrate (262) while maintaining a second portion of the substrate exposed. A sealing layer (285) is deposited over the structure and over at least a portion of the exposed second portion of the substrate (262). A conductive via (365) is formed e.g. by way of a dry etch through the sealing layer (285) to contact an exposed metal layer (250). In embodiments, an etch-stop control layer is utilized to control an etching process prior to formation of metal contacts over the CEM switch and the conductive via.


6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     3C    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 27/24 (2006.01)i; H01L 45/00 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     H01L
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2014252295 A1 (LIAO YU-WEN [TW] ET AL) 11 September 2014 (2014-09-11)
1-28
paragraph [0023] - paragraph [0049]; figures 2-16
(2)
X
WO 2017222525 A1 (INTEL CORP [US]) 28 December 2017 (2017-12-28)
29-31
page 18, line 11 - page 20, line 4; figure 6B
(3)
T
WO 2009114796 A1 (SYMETRIX CORP [US]; PAZ DE ARAUJO CARLOS A [US] ET AL.) 17 September 2009 (2009-09-17)
Nickel oxide as a Correlated Electron Material (CEM).;page 32, line 3 - line 5
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2014252295 A1
11 September 2014
CN 104037187 A
US 2014252295 A1
US 2015147864 A1
10 September 2014
11 September 2014
28 May 2015
WO 2017222525 A1
28 December 2017
NONE
WO 2009114796 A1
17 September 2009
NONE
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
15 January 2020
Date of mailing of the international search report:
27 January 2020
Authorized officer:
Gröger, Andreas
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