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1. WO2020108984 - SYSTEMS AND METHODS OF COOLING OBJECTIVE LENS OF A CHARGED-PARTICLE BEAM SYSTEM


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/EP2019/081070 2018P00226WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
12 November 2019 30 November 2018
Applicant
ASML NETHERLANDS B.V.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
This International Searching Authority found multiple inventions in this international application, as follows:
1. claims: 1-5, 9-15(completely); 6(partially)
A bobbin comprising a fluid inlet port configured to receive a fluid;a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; and a fluid outlet port configured to dispense the fluid circulated by the plurality of channels.
1.1. claims: 1-5, 12(completely); 6(partially)
The bobbin is suitable for cooling an objective lens of a charged particle beam system.The heat- sensitive element is a wafer, the bobbin further comprising a bottom flange proximal to the wafer in the charged-particle beam system, a portion of the channels being positioned at locations of the bobbin to cool a portion of the bottom flange proximal to the wafer to facilitate a reduction in heat radiated from the bobbin and towards the wafer in the vacuum environment; and a top flange distal from the wafer.
1.2. claims: 9-11
The bobbin is suitable for cooling an objective lens of a charged particle beam system.The bobbin having the plurality of channels comprises a monolithic structure.
1.3. claims: 13-15
A computer readable storage medium storing data representing a bobbin comprising a fluid inlet port configured to receive a fluid;a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; and a fluid outlet port configured to dispense the fluid circulated by the plurality of channels.The bobbin is printable on a 3D printer.
2. claim: 6(partially)
A bobbin comprising a fluid inlet port configured to receive a fluid;a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; anda fluid outlet port configured to dispense the fluid circulated by the plurality of channels.The bobbin is suitable for cooling an objective lens of a charged particle beam system.The fluid comprises a gas, a compressed gas, or mixtures thereof.
3. claims: 7, 8
A bobbin comprising a fluid inlet port configured to receive a fluid;a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; and a fluid outlet port configured to dispense the fluid circulated by the plurality of channels.The bobbin is suitable for cooling an objective lens of a charged particle beam system. The plurality of channels comprises a material having thermal conductivity in a range of 20-2000 W.m-1.K-1 .
1.
As all required additional search fees were timely paid by the applicant, this international search report covers all searchable claims.
2.
As all searchable claims could be searched without effort justifying additional fees, this Authority did not invite payment of additional fees.
3.
As only some of the required additional search fees were timely paid by the applicant, this international search report covers only those claims for which fees were paid, specifically claims Nos.:
4.
No required additional search fees were timely paid by the applicant. Consequently, this international search report is restricted to the invention first mentioned in the claims; it is covered by claims Nos.: 1-5, 9-15(completely); 6(partially)
Remark on Protest
The additional search fees were accompanied by the applicant’s protest and, where applicable, the payment of a protest fee.
The additional search fees were accompanied by the applicant’s protest but the applicable protest fee was not paid within the time limit specified in the invitation.
No protest accompanied the payment of additional search fees.
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.

Systems and methods for cooling an objective lens of a charged- particle beam system are disclosed. According to certain embodiments, the method for cooling an objective lens of a charged- particle beam system comprises receiving a fluid via a fluid input port (432) of a bobbin (320), circulating the fluid that absorbs heat generated by a plurality of electromagnetic coils of the objective lens, via a plurality of channels (335,635) distributed in the bobbin, and dispensing the fluid circulated by the plurality of channels via a fluid output port (532) of the bobbin. The bobbin may further comprise a bottom flange (520) proximal to a wafer and a top flange (510) distal from the wafer. The bobbin having the plurality of channels may comprise an additively manufactured monolithic structure.


6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     8    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01J 37/141 (2006.01)i; B33Y 80/00 (2015.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     H01J; B33Y
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2017213689 A1 (ABE TOMOHIKO [JP] ET AL) 27 July 2017 (2017-07-27)
1,3-6,9-15
figures 1-6,8
paragraphs [0009], [0020], [0032], [0037], [0038], [0042], [0048] - [0051], [0054], [0058]
paragraphs [0062], [0063], [0065], [0067], [0068], [0070] - [0072]
paragraphs [0074] - [0083], [0090] - [0092], [0103]
(2)
X
JP S61227356 A (HITACHI LTD) 09 October 1986 (1986-10-09)
1-6
abstract; figures 1,3,4
(3)
X
JP S57140169 U (-) 02 September 1982 (1982-09-02)
1,3,4,6,12
figures 1,2
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2017213689 A1
27 July 2017
CN 107017142 A
EP 3200216 A1
JP 2017135218 A
KR 20170089394 A
TW 201727690 A
TW 201907435 A
US 2017213689 A1
04 August 2017
02 August 2017
03 August 2017
03 August 2017
01 August 2017
16 February 2019
27 July 2017
JP S61227356 A
09 October 1986
NONE
JP S57140169 U
02 September 1982
NONE
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
14 February 2020
Date of mailing of the international search report:
24 June 2020
Authorized officer:
Giovanardi, Chiara
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