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1. WO2020108984 - SYSTEMS AND METHODS OF COOLING OBJECTIVE LENS OF A CHARGED-PARTICLE BEAM SYSTEM

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

CLAIMS:

1. A bobbin for cooling an objective lens of a charged-particle beam system, the bobbin

comprising:

a fluid inlet port configured to receive a fluid;

a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from a portion of the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; and

a fluid outlet port configured to dispense the fluid circulated by the plurality of channels.

2. The bobbin of claim 1, wherein the heat-sensitive element is a wafer, further comprising: a bottom flange proximal to the wafer in the charged-particle beam system, a portion of the channels being positioned at locations of the bobbin to cool a portion of the bottom flange proximal to the wafer to facilitate a reduction in heat radiated from the bobbin and towards the wafer in the vacuum environment; and

a top flange distal from the wafer.

3. The bobbin of any one of claims 1-2, wherein the plurality of channels comprises:

an inlet channel configured to circulate the fluid received from the fluid inlet port; and an outlet channel configured to direct the circulating fluid to the fluid outlet port.

4. The bobbin of claim 3, wherein the plurality of channels further comprises an intermediate channel fluidly connected with the inlet and the outlet channel.

5. The bobbin of any one of claims 1-4, wherein the circulated fluid absorbs heat generated by a plurality of electromagnetic coils wound around at least a portion of the bobbin.

6. The bobbin of any one of claims 1-5, wherein the fluid comprises one of a liquid, a coolant, a gas, a compressed gas, or mixtures thereof.

7. The bobbin of any one of claims 1-6, wherein the plurality of channels comprises a material having thermal conductivity in a range of 20-2000 W.mTK 1.

8. The bobbin of claim 7, wherein the material of the plurality of channels comprises aluminum, titanium, copper, graphite, aluminum carbide, aluminum nitride, plastics, composites, or alloys.

9. The bobbin of any one of claims 1-8, wherein the bobbin having the plurality of channels comprises a monolithic structure.

10. The bobbin of claim 9, wherein the monolithic structure comprises an additively

manufactured monolithic structure.

11. The bobbin of claim 10, wherein the additively manufactured monolithic structure comprises at least one of a metal, a metal alloy, a ceramic, or a ceramic composite.

12. The bobbin of any one of claims 1-8, wherein the bobbin having the plurality of channels comprises a plurality of parts coupled together.

13. A computer readable storage medium storing data representing a bobbin that is printable on a 3D printer, the bobbin comprising:

a fluid inlet port configured to receive a fluid;

a plurality of channels distributed in the bobbin, the channels being configured to reduce heat radiated in a vacuum environment from the bobbin towards a heat-sensitive element, and being configured to circulate the fluid received by the fluid inlet port; and

a fluid outlet port configured to dispense the fluid circulated by the plurality of channels.

14. The medium of claim 13, wherein the heat-sensitive element is a wafer.

15. The medium of claim 13, wherein the channels being configured to reduce the heat radiated in the vacuum environment from the bobbin towards the heat-sensitive element include the channels being located at locations on the bobbin that cool a portion of the bobbin that radiates heat through the vacuum environment towards the heat-sensitive element.