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1. WO2020108862 - METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

CLAIMS

1. A user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising:

a library of control elements comprising at least a control element representing a task of simulation and each control element being selectable by a user;

a control flow editor configured to organize said control elements into a control flow representing the control strategy; and

a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.

2. A user interface as claimed in claim 1 wherein the library of control elements further comprises control elements representing one or more of the following types of tasks: optimization, sampling, visualization and estimation.

3. A user interface as claimed in claim 1 or 2, further comprising a library of data elements representing one or more data sources and/or data stores.

4. A user interface as claimed in claim 3, wherein one or more of the data elements are individually configurable.

5. A user interface as claimed in claim 1, wherein one or more of the control elements are individually configurable.

6. A user interface as claimed in claim 5, wherein the control elements are configurable by selecting a particular action and/or module for the control element.

7. A user interface as claimed in claim 1, wherein the control flow editor is further configured to enable editing of one or more provided pre -defined control flows.

8. A control strategy evaluation tool comprising:

a user interface as claimed in claim 1 ; and

said calculation engine configured to evaluate the control flow received via the communication interface.

9. A control strategy evaluation tool as claimed in claim 8, wherein the calculation engine is configured to simulate the control strategy described by the control flow; and

evaluate the control strategy based on the simulation.

10. A control strategy evaluation tool as claimed in claim 8, wherein the control strategy evaluation tool further comprises an advisor module configured to provide advice on said control flow, wherein the advice comprises advice for optimizing the semiconductor manufacturing process..

11. A control strategy evaluation tool as claimed in claim 10, wherein the advice comprises one or more of: advice on which control elements and/or settings thereof might optimize a control flow, advice on which control flow might optimize the semiconductor manufacturing process, recommendation against, or even prevention of selection of an inappropriate control element, setting or flow, and advice on the data available for control setup and/or simulation.

12. A control strategy evaluation tool as claimed in claim 8, wherein the control strategy evaluation tool comprises an artificial data generator for generating artificial data for use by the calculation engine in the evaluation step.

13. A control strategy evaluation tool as claimed in claim 12, wherein the artificial data generator is operable to extrapolate, interpolate or otherwise obtain artificial data from measured data for which the effect of a one or more variations on a control strategy, and/or another characteristic of the semiconductor manufacturing process, used to obtain said measured data is estimated.

14. A non-transient computer program carrier comprising a computer program implementing the user interface of claim 1.

15. A non-transient computer program carrier comprising the computer program implementing the control strategy evaluation tool of claim 8.