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1. WO2020108862 - METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS

Publication Number WO/2020/108862
Publication Date 04.06.2020
International Application No. PCT/EP2019/078570
International Filing Date 21.10.2019
IPC
G05B 19/409 2006.01
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
18Numerical control (NC), i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
409characterised by using manual data input (MDI) or by using control panel, e.g. controlling functions with the panel; characterised by control panel details, by setting parameters
G05B 19/418 2006.01
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)
CPC
G05B 19/41885
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
41885characterised by modeling, simulation of the manufacturing system
G05B 2219/32128
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
32Operator till task planning
32128Gui graphical user interface
G05B 2219/32162
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
32Operator till task planning
32162Tasks or control icons are linked to form a job
G05B 2219/36025
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
36Nc in input of data, input key till input tape
36025Link, connect icons together to form program
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • CHEN, Chang-Wei
  • ZENG, Si-Han
Agents
  • PETERS, John Antoine
Priority Data
18208386.526.11.2018EP
19160513.804.03.2019EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD FOR DETERMINING ROOT CAUSES OF EVENTS OF A SEMICONDUCTOR MANUFACTURING PROCESS AND FOR MONITORING A SEMICONDUCTOR MANUFACTURING PROCESS
(FR) PROCÉDÉ DESTINÉ À DÉTERMINER LES CAUSES RACINES D’ÉVÉNEMENTS D’UN PROCÉDÉ DE FABRICATION DE SEMI-CONDUCTEURS ET À CONTRÔLER UN PROCÉDÉ DE FABRICATION DE SEMI-CONDUCTEURS
Abstract
(EN)
Described is a user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface comprising: a library of control elements comprising at least a control element representing a task of simulation and each control element being selectable by a user; a control flow editor configured to organize said control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.
(FR)
L’invention décrit une interface d’utilisateur destinée à concevoir, à configurer et/ou à modifier un flux de commande représentant une stratégie de commande associée à un procédé de fabrication de semi-conducteurs, l’interface d’utilisateur comprenant : une bibliothèque d’éléments de commande comprenant au moins un élément de commande représentant une tâche de simulation et chaque élément de commande pouvant être sélectionné par un utilisateur ; un modificateur de flux de commande configuré pour organiser lesdits éléments de commande en un flux de commande représentant la stratégie de commande ; et une interface de communication destinée à communiquer le flux de commande à un moteur de calcul configuré pour évaluer le flux de commande.
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