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1. WO2020108846 - METHOD FOR OF MEASURING A FOCUS PARAMETER RELATING TO A STRUCTURE FORMED USING A LITHOGRAPHIC PROCESS


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/EP2019/078172 2018P00272WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
17 October 2019 26 November 2018
Applicant
ASML NETHERLANDS B.V.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     4    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G03F 7/20 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     G03F
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2017255738 A1 (VAN LEEST ADRIAAN JOHAN [NL] ET AL) 07 September 2017 (2017-09-07)
1-3,5-15
paragraphs [0119], [0189] - [0191], [0258]
(2)
X
WO 2009156225 A1 (ASML NETHERLANDS BV [NL]; DEN BOEF ARIE [NL]) 30 December 2009 (2009-12-30)
1-3,5-15
paragraphs [0043] - [0049]; figures 4b, 5
(3)
A
US 2003206298 A1 (BISCHOFF JOERG [DE] ET AL) 06 November 2003 (2003-11-06)
1-15
paragraphs [0053] - [0057], [0100]; figures 4A, 4B
(4)
A
US 2005195413 A1 (BRILL BOAZ [IL]) 08 September 2005 (2005-09-08)
1-15
paragraphs [0042] - [0043]; figure 6
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2017255738 A1
07 September 2017
CN 109073995 A
CN 109073996 A
CN 109073997 A
CN 109073998 A
CN 109073999 A
JP 2019508741 A
JP 2019508742 A
JP 2019508744 A
JP 2019508745 A
JP 2019512110 A
KR 20180116383 A
KR 20180116384 A
KR 20180116388 A
KR 20180118707 A
KR 20180118708 A
TW 201734632 A
TW 201741779 A
TW 201743141 A
TW 201743142 A
TW 201743143 A
US 2017255112 A1
US 2017255736 A1
US 2017255737 A1
US 2017255738 A1
US 2017256465 A1
WO 2017148982 A1
WO 2017148986 A1
WO 2017148996 A1
WO 2017149003 A1
WO 2017149009 A1
21 December 2018
21 December 2018
21 December 2018
21 December 2018
21 December 2018
28 March 2019
28 March 2019
28 March 2019
28 March 2019
09 May 2019
24 October 2018
24 October 2018
24 October 2018
31 October 2018
31 October 2018
01 October 2017
01 December 2017
16 December 2017
16 December 2017
16 December 2017
07 September 2017
07 September 2017
07 September 2017
07 September 2017
07 September 2017
08 September 2017
08 September 2017
08 September 2017
08 September 2017
08 September 2017
WO 2009156225 A1
30 December 2009
CN 102067040 A
EP 2304504 A1
IL 210126 A
JP 2011525713 A
KR 20110036084 A
SG 195527 A1
TW 201003332 A
US 2011188020 A1
WO 2009156225 A1
18 May 2011
06 April 2011
31 July 2016
22 September 2011
06 April 2011
30 December 2013
16 January 2010
04 August 2011
30 December 2009
US 2003206298 A1
06 November 2003
US 2003206298 A1
US 2005030536 A1
06 November 2003
10 February 2005
US 2005195413 A1
08 September 2005
AU 2003209646 A1
IL 148485 A
US 2005195413 A1
WO 03075041 A2
16 September 2003
08 July 2008
08 September 2005
12 September 2003
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
08 November 2019
Date of mailing of the international search report:
27 November 2019
Authorized officer:
Weckesser, Jens
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