Processing

Please wait...

Settings

Settings

Goto Application

1. WO2020108417 - METHOD FOR ADJUSTING MEASUREMENT LIGHT PATH OF SCRIBE LINE POSITION OF GRATING RULING ENGINE, AND SYSTEM FOR SAME

Publication Number WO/2020/108417
Publication Date 04.06.2020
International Application No. PCT/CN2019/120450
International Filing Date 23.11.2019
IPC
G02B 5/18 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffracting gratings
G03F 9/00 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
9Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
CPC
B23K 26/06
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
B23K 26/064
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
064by means of optical elements, e.g. lenses, mirrors or prisms
B23K 26/36
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
36Removing material
G02B 5/1857
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffraction gratings
1847Manufacturing methods
1857using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Applicants
  • 中国科学院长春光学精密机械与物理研究所 CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SC [CN]/[CN]
Inventors
  • 唐玉国 TANG, Yuguo
  • 糜小涛 MI, Xiaotao
  • 齐向东 QI, Xiangdong
  • 于海利 YU, Haili
  • 巴音贺希格 BAYIN, Hexige
  • 张善文 ZHANG, Shanwen
  • 于宏柱 YU, Hongzhu
Agents
  • 深圳市科进知识产权代理事务所(普通合伙) SHENZHEN KEJIN INTELLECTUAL PROPERTY OFFICE
Priority Data
201811414449.726.11.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) METHOD FOR ADJUSTING MEASUREMENT LIGHT PATH OF SCRIBE LINE POSITION OF GRATING RULING ENGINE, AND SYSTEM FOR SAME
(FR) PROCÉDÉ DE RÉGLAGE DE TRAJET DE LUMIÈRE DE MESURE DE POSITION DE LIGNE DE DÉCOUPE D'UN MOTEUR DE RÈGLES DE RÉSEAU ET SYSTÈME ASSOCIÉ
(ZH) 一种光栅刻划机刻线位置测量光路的调整方法及其系统
Abstract
(EN)
A method for adjusting a measurement light path of a scribe line position of a grating ruling engine, and a system for the same, pertaining to the technical field of diffraction grating manufacturing. The method comprises: installing a crosshair target element (10) on a work platform (8) of the grating ruling engine; installing a laser (1), the laser (1) emitting a beam on the crosshair target element (10), and adjusting an orientation of the laser (1); installing a measurement mirror (7), and adjusting an orientation of the measurement mirror (7); installing a beam splitter (2) between the laser (1) and the measurement mirror (7), a light beam emitted by the laser (1) being transmitted through the beam splitter (2) and irradiating the measurement mirror (7), and adjusting an orientation of the beam splitter (2); installing a deflection mirror (3) at a position parallel to the beam splitter (2), a light beam emitted by the laser (1) irradiating the measurement mirror (7) via the deflection mirror (3), and adjusting an orientation of the deflection mirror (3); and installing a laser interferometer A (4) between the beam splitter (2) and the measurement mirror (7), installing a laser interferometer B (5) between the deflection mirror (3) and the measurement mirror (7), and adjusting orientations of the laser interferometer A (4) and the laser interferometer B (5).
(FR)
L'invention concerne un procédé de réglage d'un trajet de lumière de mesure d'une position de ligne de découpe d'un moteur de règles de réseau et un système associé, appartenant au domaine technique de la fabrication de réseau de diffraction. Le procédé comprend : l'installation d'un élément de cible en réticule (10) sur une plateforme de travail (8) du moteur de règles de réseau ; l'installation d'un laser (1), le laser (1) émettant un faisceau sur l'élément de cible en réticule (10), et le réglage d'une orientation du laser (1) ; l'installation d'un miroir de mesure (7) et le réglage d'une orientation du miroir de mesure (7) ; l'installation d'un diviseur de faisceau (2) entre le laser (1) et le miroir de mesure (7), un faisceau lumineux émis par le laser (1) étant transmis à travers le diviseur de faisceau (2) et irradiant le miroir de mesure (7) et le réglage d'une orientation du diviseur de faisceau (2) ; l'installation d'un miroir de déviation (3) à une position parallèle au diviseur de faisceau (2), un faisceau lumineux émis par le laser (1) irradiant le miroir de mesure (7) par l'intermédiaire du miroir de déviation (3), et le réglage d'une orientation du miroir de déviation (3) ; et l'installation d'un interféromètre laser A (4) entre le diviseur de faisceau (2) et le miroir de mesure (7), l'installation d'un interféromètre laser B (5) entre le miroir de déviation (3) et le miroir de mesure (7), et le réglage des orientations de l'interféromètre laser A (4) et de l'interféromètre laser B (5).
(ZH)
一种光栅刻划机刻线位置测量光路的调整方法及其系统,涉及衍射光栅制作技术领域;先将十字靶(10)安装在光栅刻划机的工作台(8)上;再安装好激光器(1),激光器(1)发射光束射在十字靶(10)上而对激光器(1)进行姿态调整;然后安装好测量镜(7)并对测量镜(7)进行姿态调整;再然后在激光器(1)和测量镜(7)之间安装好分束镜(2),激光器(1)发射的光束透过分束镜(2)照射在测量镜(7)上而对分束镜(2)的姿态进行调整;再然后在分束镜(2)平行的位置上安装折转镜(3),激光器(1)发射的光束透过折转镜(3)照射在测量镜(7)上而对折转镜(3)的姿态进行调整;最后在分束镜(2)与测量镜(7)之间安装激光干涉仪A(4),在折转镜(3)与测量镜(7)之间安装激光干涉仪B(5),对激光干涉仪A(4)和激光干涉仪B(5)进行姿态调整。
Also published as
Latest bibliographic data on file with the International Bureau