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1. WO2020108038 - MULTI-DEGREE OF FREEDOM SAMPLE ROD

Publication Number WO/2020/108038
Publication Date 04.06.2020
International Application No. PCT/CN2019/106864
International Filing Date 20.09.2019
IPC
H01J 37/20 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
CPC
H01J 37/20
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
20Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Applicants
  • 浙江大学 ZHEJIANG UNIVERSITY [CN]/[CN]
Inventors
  • 王宏涛 WANG, Hong Tao
  • 张奕志 ZHANG, Yi Zhi
Agents
  • 浙江杭州金通专利事务所有限公司 ZHEJIANG HANGZHOU JINTONG PATENT AGENCY CO., LTD.
Priority Data
201811450173.830.11.2018CN
201811450175.730.11.2018CN
201811450184.630.11.2018CN
201811450211.X30.11.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) MULTI-DEGREE OF FREEDOM SAMPLE ROD
(FR) TIGE D'ÉCHANTILLON À PLUSIEURS DEGRÉS DE LIBERTÉ
(ZH) 多自由度样品杆
Abstract
(EN)
A multi-degree of freedom sample rod, comprising a housing (109) and a rotation shaft (110). A frame (112) is provided between the housing (109) and the rotation shaft (110). The frame (112) is coaxial to the housing (109) and the rotation shaft (110). Optionally, at least one group of rotation shaft drive components is provided between the frame (112) and the rotation shaft (110). The sample rod is provided with a nanopositioner. An electrostatic export member is provided at the tail of the nanopositioner.
(FR)
L'invention concerne une tige d'échantillon à plusieurs degrés de liberté, comprenant un boîtier (109) et un arbre de rotation (110). Un cadre (112) est fourni entre le boîtier (109) et l'arbre de rotation (110). Le cadre (112) est coaxial au boîtier (109) et à l'arbre de rotation (110). Facultativement, au moins un groupe de composants d'entraînement d'arbre de rotation est disposé entre le cadre (112) et l'arbre de rotation (110). La tige d'échantillon est pourvue d'un nanopositionneur. Un élément d'exportation électrostatique est disposé au niveau de la queue du nanopositionneur.
(ZH)
一种多自由度样品杆,包括外壳(109)和转轴(110),外壳(109)与转轴(110)之间设有骨架(112),骨架(112)与外壳(109)、转轴(110)同轴;可选地,骨架(112)和转轴(110)之间设有至少一组转轴驱动组件,样品杆上设有纳米定位器,纳米定位器的尾端设有静电导出件。
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