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1. WO2020107647 - REPAIRING METHOD IN MANUFACTURING PROCESS FOR ARRAY SUBSTRATE

Publication Number WO/2020/107647
Publication Date 04.06.2020
International Application No. PCT/CN2019/070313
International Filing Date 03.01.2019
IPC
G02F 1/1362 2006.01
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362Active matrix addressed cells
CPC
G02F 1/136259
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362Active matrix addressed cells
136259Repairing; Defects
Applicants
  • 深圳市华星光电技术有限公司 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN]/[CN]
Inventors
  • 何伟 HE, Wei
Agents
  • 深圳市德力知识产权代理事务所 COMIPS INTELLECTUAL PROPERTY OFFICE
Priority Data
201811459026.730.11.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) REPAIRING METHOD IN MANUFACTURING PROCESS FOR ARRAY SUBSTRATE
(FR) PROCÉDÉ DE RÉPARATION DANS UN PROCESSUS DE FABRICATION D'UN SUBSTRAT DE RÉSEAU
(ZH) 阵列基板制作过程中的修补方法
Abstract
(EN)
A repairing method in the manufacturing process for an array substrate, comprising the following steps: forming a conductive pattern on a substrate; performing optical inspection and electrical inspection on the conductive pattern; and determining the positions of defect points on the conductive pattern by combining the optical inspection result with the electrical inspection result, and repairing the defect points. The positions of defect points are determined by combining the optical inspection result with the electrical inspection result, thereby increasing the accuracy and success rate of defect point searching, and improving the success rate of defect point repair.
(FR)
La présente invention concerne un procédé de réparation dans le processus de fabrication d'un substrat de réseau qui comprend les étapes suivantes consistant : à former un motif conducteur sur un substrat ; à effectuer une inspection optique et une inspection électrique sur le motif conducteur ; et à déterminer les positions de points de défaut sur le motif conducteur en combinant le résultat d'inspection optique avec le résultat d'inspection électrique, et à réparer les points de défaut. Les positions des points de défaut sont déterminées en combinant le résultat d'inspection optique avec le résultat d'inspection électrique, ce qui permet d'augmenter la précision et le taux de réussite d'une recherche de point de défaut et d'améliorer le taux de réussite de réparation de point de défaut.
(ZH)
一种阵列基板制作过程中的修补方法,包括如下步骤:在基板上形成导电图案;对所述导电图案进行光学检测和电性检测;利用光学检测结果与电性检测结果的结合,确定所述导电图案上的缺陷点的位置,并对所述缺陷点进行修复。通过光学检测结果与电性检测结果结合确定缺陷点的位置,能够提升缺陷点查找的准确率和成功率,改善缺陷点的修补成功率。
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