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1. WO2020094723 - VOLTAGE WAVEFORM GENERATOR FOR PLASMA PROCESSING APPARATUSES

Publication Number WO/2020/094723
Publication Date 14.05.2020
International Application No. PCT/EP2019/080405
International Filing Date 06.11.2019
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
G05F 3/20 2006.01
GPHYSICS
05CONTROLLING; REGULATING
FSYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
3Non-retroactive systems for regulating electric variables by using an uncontrolled element, or an uncontrolled combination of elements, such element or such combination having self-regulating properties
02Regulating voltage or current
08wherein the variable is dc
10using uncontrolled devices with non-linear characteristics
16being semiconductor devices
20using diode-transistor combinations
Applicants
  • PRODRIVE TECHNOLOGIES B.V. [NL]/[NL]
Inventors
  • DRIESSEN, Antonius Wilhelmus Hendricus Johannes
  • VAN GENNIP, Wouter Johan Hendrik
Agents
  • PRONOVEM
Priority Data
18205472.609.11.2018EP
202222217.12.2018NL
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) VOLTAGE WAVEFORM GENERATOR FOR PLASMA PROCESSING APPARATUSES
(FR) GÉNÉRATEUR DE FORMES D'ONDE DE TENSION POUR APPAREILS DE TRAITEMENT AU PLASMA
Abstract
(EN)
Plasma processing apparatus (100), comprising means for generating a plasma (103), a processing platform (105) for supporting a substrate (101) to be processed, and a voltage waveform generator (10) comprising an output (19) electrically coupled to the processing platform. The voltage waveform generator comprises a plurality of first buck converters (11) arranged in parallel and coupled to the output, the first buck converters comprising actively switchable semiconductor switches (111), and a control unit (130) configured to operate the actively switchable semiconductor switches through pulse width modulation signals. The control unit is configured to operate the plurality of first buck converters in an interleaved manner.
(FR)
L'invention concerne un appareil de traitement au plasma (100) comprenant des moyens de génération d'un plasma (103), une plateforme de traitement (105) destinée à supporter un substrat (101) à traiter, et un générateur de formes d'onde de tension (10) comprenant une sortie (19) couplée électriquement à la plateforme de traitement. Le générateur de formes d'onde de tension comprend une pluralité de premiers convertisseurs abaisseurs de tension (11) disposés en parallèle et couplés à la sortie, les premiers convertisseurs abaisseurs de tension comportant des commutateurs à semi-conducteurs à commutation active (111), et une unité de commande (130) conçue pour faire fonctionner les commutateurs à semi-conducteurs à commutation active par l'intermédiaire de signaux de modulation de largeur d'impulsion. L'unité de commande est conçue pour faire fonctionner la pluralité de premiers convertisseurs abaisseurs de tension de manière entrelacée.
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