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1. WO2020094351 - SEMICONDUCTOR TRANSDUCER DEVICE WITH MULTILAYER DIAPHRAGM AND METHOD OF MANUFACTURING A SEMICONDUCTOR TRANSDUCER DEVICE WITH MULTILAYER DIAPHRAGM

Publication Number WO/2020/094351
Publication Date 14.05.2020
International Application No. PCT/EP2019/078113
International Filing Date 16.10.2019
IPC
G01L 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
CPC
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
G01L 9/0073
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0073using a semiconductive diaphragm
Applicants
  • SCIOSENSE B.V. [NL]/[NL]
Inventors
  • FAES, Alessandro
  • SIEGERT, Jörg
  • BESLING, Willem Frederik Adrianus
  • PIJNENBURG, Remco Henricus Wilhelmus
Agents
  • EPPING HERMANN FISCHER PATENTANWALTSGESELLSCHAFT MBH
Priority Data
18205001.307.11.2018EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SEMICONDUCTOR TRANSDUCER DEVICE WITH MULTILAYER DIAPHRAGM AND METHOD OF MANUFACTURING A SEMICONDUCTOR TRANSDUCER DEVICE WITH MULTILAYER DIAPHRAGM
(FR) DISPOSITIF DE TRANSDUCTEUR À SEMI-CONDUCTEUR AVEC DIAPHRAGME MULTICOUCHE ET PROCÉDÉ DE FABRICATION D'UN DISPOSITIF DE TRANSDUCTEUR À SEMI-CONDUCTEUR AVEC DIAPHRAGME MULTICOUCHE
Abstract
(EN)
The semiconductor transducer device comprises a diaphragm (10) suspended above a semiconductor body (1). A first layer (9) of the diaphragm (10) comprises a material that is resistant to an etchant comprising fluorine or a fluorine compound and covers a second layer (8) that comprises titanium and/or TiN. Thus the first layer (9) acts as protection layer and prevents production of residues like titanium fluorides during the etching of a sacrificial layer (5) using HF vapor to release the diaphragm (10).
(FR)
L'invention concerne un dispositif de transducteur à semi-conducteur qui comprend un diaphragme (10) suspendu au-dessus d'un corps semi-conducteur (1). Une première couche (9) du diaphragme (10) comprend un matériau qui est résistant à un agent de gravure comprenant du fluor ou un composé de fluor et recouvre une seconde couche (8) qui comprend du titane et/ou du TiN. Ainsi, la première couche (9) agit comme couche de protection et empêche la production de résidus comme des fluorures de titane pendant la gravure d'une couche sacrificielle (5) à l'aide de vapeur HF pour libérer le diaphragme (10).
Also published as
Latest bibliographic data on file with the International Bureau