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1. WO2020093954 - FILM LAYER ANALYSIS METHOD AND APPARATUS FOR ELECTROLUMINESCENT DEVICE, AND STORAGE MEDIUM

Publication Number WO/2020/093954
Publication Date 14.05.2020
International Application No. PCT/CN2019/115146
International Filing Date 01.11.2019
IPC
G01N 27/62 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
62by investigating the ionisation of gases; by investigating electric discharges, e.g. emission of cathode
H01L 51/50 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
CPC
G01N 27/62
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
62by investigating the ionisation of gases; by investigating electric discharges, e.g. emission of cathode
H01L 51/50
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
H01L 51/5012
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
5012Electroluminescent [EL] layer
Applicants
  • 京东方科技集团股份有限公司 BOE TECHNOLOGY GROUP CO., LTD. [CN]/[CN]
  • 成都京东方光电科技有限公司 CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN]/[CN]
Inventors
  • 刘莹 LIU, Ying
  • 彭于航 PENG, Yuhang
  • 杜聪聪 DU, Congcong
  • 范磊 FAN, Lei
  • 范春芳 FAN, Chunfang
  • 吴启 WU, Qi
  • 薛孝忠 XUE, Xiaozhong
  • 秦浩然 QIN, Haoran
Agents
  • 北京三高永信知识产权代理有限责任公司 BEIJING SAN GAO YONG XIN INTELLECTUAL PROPERTY AGENCY CO., LTD.
Priority Data
201811308434.205.11.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) FILM LAYER ANALYSIS METHOD AND APPARATUS FOR ELECTROLUMINESCENT DEVICE, AND STORAGE MEDIUM
(FR) PROCÉDÉ D'ANALYSE DE COUCHE DE FILM ET APPAREIL POUR DISPOSITIF ÉLECTROLUMINESCENT, ET SUPPORT DE STOCKAGE
(ZH) 电致发光器件的膜层分析方法、装置和存储介质
Abstract
(EN)
Disclosed is a film layer analysis method for an electroluminescent device. The electroluminescent device comprises: an anode layer, an electroluminescent material layer and a silver-bearing cathode layer laminated in sequence. The film layer analysis method comprises: using a first ion sputtering source to peel off the silver-bearing cathode layer from an electroluminescent device to obtain an analysis sample with an electroluminescent material layer being exposed; and using a second ion sputtering source to analyze the exposed electroluminescent material layer, wherein sputtering energy of the first ion sputtering source is greater than sputtering energy of the second ion sputtering source. The silver-bearing cathode layer is peeled off by means of sputtering using the first ion sputtering source, and the peeling process is stable and controllable, and the silver-bearing cathode layer can be effectively and thoroughly removed, avoiding peeling an electroluminescent material layer.
(FR)
L'invention concerne un procédé d'analyse de couche de film pour dispositif électroluminescent. Le dispositif électroluminescent comprend : une couche anodique, une couche de matériau électroluminescent, et une couche cathodique à l'argent stratifiées en séquence. Le procédé d'analyse de couche de film consiste : à utiliser une première source de pulvérisation ionique pour décoller la couche cathodique à l'argent d'un dispositif électroluminescent pour obtenir un échantillon d'analyse présentant une couche de matériau électroluminescent exposée; et à utiliser une seconde source de pulvérisation ionique pour analyser la couche de matériau électroluminescent exposée, l'énergie de pulvérisation de la première source de pulvérisation ionique étant supérieure à l'énergie de pulvérisation de la seconde source de pulvérisation ionique. La couche cathodique à l'argent est décollée par pulvérisation effectuée avec la première source de pulvérisation ionique, et le processus de pelage est stable et contrôlable, et la couche cathodique à l'argent peut être complètement retirée avec efficacité, évitant ainsi le décollement d'une couche de matériau électroluminescent.
(ZH)
本发明公开了一种电致发光器件的膜层分析方法,其中,电致发光器件包括:依次层叠的阳极层、电致发光材料层、以及含银阴极层。该膜层分析方法包括:利用第一离子溅射源从电致发光器件上剥离含银阴极层,得到暴露有电致发光材料层的分析样品;利用第二离子溅射源对暴露的电致发光材料层进行分析。第一离子溅射源的溅射能量大于第二离子溅射源的溅射能量。通过第一离子溅射源对含银阴极层进行溅射剥离,其剥离过程稳定可控,能够有效且彻底地去除含银阴极层,避免了对电致发光材料层进行剥离。
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