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1. WO2020093238 - Time Dependent Dielectric Breakdown Test Structure and Test Method Thereof

Publication Number WO/2020/093238
Publication Date 14.05.2020
International Application No. PCT/CN2018/114143
International Filing Date 06.11.2018
IPC
G01R 31/12 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
12Testing dielectric strength or breakdown voltage
H01L 21/66 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66Testing or measuring during manufacture or treatment
Applicants
  • YANGTZE MEMORY TECHNOLOGIES CO., LTD. [CN]/[CN]
Inventors
  • YANG, Shengwei
  • HAN, Kun
Agents
  • NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD.
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) Time Dependent Dielectric Breakdown Test Structure and Test Method Thereof
(FR) STRUCTURE DE TEST DE CLAQUAGE DIÉLECTRIQUE DÉPENDANT DU TEMPS ET PROCÉDÉ DE TEST CORRESPONDANT
Abstract
(EN)
A time dependent dielectric breakdown test structure (1, 3) includes a plurality of test units connected in parallel between a constant voltage and a ground. Each of the plurality of test units (10, 30) includes a dielectric test sample (Gn, Gp) connected to the constant voltage (V+, V-); and a current restraint unit connected between the dielectric test sample (Gn, Gp) and the ground, for restraining a breakdown current (In, Ip) from flowing on the dielectric test sample (Gn, Gp) after the constant voltage (V+, V-) has broken the dielectric test sample (Gn, Gp).
(FR)
L'invention concerne une structure de test de claquage diélectrique dépendant du temps comprenant une pluralité d'unités de test connectées en parallèle entre une tension constante et une masse. Chaque unité de la pluralité d'unités de test (10, 30) comprend un échantillon de test diélectrique (Gn, Gp) connecté à la tension constante (V+, V-) ; et une unité de retenue de courant connectée entre l'échantillon de test diélectrique (Gn, Gp) et la masse, permettant de limiter la circulation d'un courant de claquage (In, Ip) sur l'échantillon de test diélectrique (Gn, Gp) après le claquage par la tension constante (V+, V-) de l'échantillon de test diélectrique (Gn, Gp).
Also published as
CN201880002396.X
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