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1. WO2020092668 - TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR

Publication Number WO/2020/092668
Publication Date 07.05.2020
International Application No. PCT/US2019/059001
International Filing Date 31.10.2019
IPC
F16C 33/37 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
33Parts of bearings; Special methods for making bearings or parts thereof
30Parts of ball or roller bearings
37Loose spacing bodies
B25J 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
11Manipulators not otherwise provided for
B65G 47/90 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47Article or material-handling devices associated with conveyors; Methods employing such devices
74Feeding, transfer, or discharging devices of particular kinds or types
90Devices for picking-up and depositing articles or materials
F16C 29/06 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
29Bearings for parts moving only linearly
04Ball or roller bearings
06in which the rolling bodies circulate partly without carrying load
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
CPC
H01L 21/67706
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67706Mechanical details, e.g. roller, belt
H01L 21/6773
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
6773Conveying cassettes, containers or carriers
H01L 21/67766
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67766Mechanical parts of transfer devices
H01L 21/67781
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67778involving loading and unloading of waers
67781Batch transfer of wafers
Applicants
  • BROOKS AUTOMATION, INC. [US]/[US]
Inventors
  • BABBS, Daniel
  • MAY, Robert C.
  • CAVENEY, Robert T.
Agents
  • MARCOVICI, Janik
  • KNOTTS, William
Priority Data
16/668,29030.10.2019US
62/754,46501.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR
(FR) APPAREIL DE TRANSPORT AVEC PALIER LINÉAIRE ET PROCÉDÉ ASSOCIÉ
Abstract
(EN)
A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260°C for a specified predetermined service period.
(FR)
La présente invention concerne un appareil de transport de substrat sous vide comprenant un cadre, une section d'entraînement ayant un axe d'entraînement, au moins un bras, comportant un effecteur d'extrémité pour maintenir un substrat, ayant au moins un axe de degré de liberté effectuant une extension et une rétraction, et un palier définissant une voie de guidage qui définit l'axe, le palier comprenant au moins un élément de support de charge de roulement disposé dans un boîtier de palier, interfacé entre un chemin de roulement de palier et un rail de support pour soutenir des charges de bras, et effectuer le coulissement du boîtier le long du rail, et au moins un élément d'espacement roulant, sensiblement sans support de charge, disposé dans le boîtier, intercalé entre chacun des éléments de support de charge, l'élément d'espacement étant un matériau tampon sacrificiel compatible avec un service sensiblement non limité prolongé correspondant à un service de fonctionnement prédéterminé de l'appareil dans un environnement sous vide à des températures supérieures à 260 °C pendant une durée de fonctionnement prédéterminée spécifiée.
Latest bibliographic data on file with the International Bureau