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1. WO2020092162 - APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

Publication Number WO/2020/092162
Publication Date 07.05.2020
International Application No. PCT/US2019/058110
International Filing Date 25.10.2019
IPC
H05G 2/00 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
CPC
H05G 2/006
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
001X-ray radiation generated from plasma
003being produced from a liquid or gas
006details of the ejection system, e.g. constructional details of the nozzle
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • VASCHENKO, Georgiy Olegovich
  • RAJYAGURU, Chirag
  • ERSHOV, Alexander Igorevich
  • LUKENS, Joshua Mark
  • ABRAHAM, Mathew Cheeran
  • ROLLINGER, Bob
Agents
  • MARCELLI, Mark
Priority Data
62/752,11629.10.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME
(FR) APPAREIL ET PROCÉDÉ POUR ÉTENDRE LA DURÉE DE VIE D'UN SYSTÈME DE DISTRIBUTION DE MATÉRIAU CIBLE
Abstract
(EN)
Disclosed is a system for generating EUV radiation in which current flowing through target material in the orifice 320 of a nozzle in a droplet generator is controlled by providing alternate lower impedance paths for the current and/or by limiting a high frequency component of a drive signal applied to the droplet generator.
(FR)
L'invention concerne un système pour générer un rayonnement EUV dans lequel un courant circulant à travers un matériau cible dans l'orifice 320 d'une buse dans un générateur de gouttelettes est commandé en assurant des trajets d'impédance inférieurs alternatifs pour le courant et/ou en limitant une composante haute fréquence d'un signal d'excitation appliqué au générateur de gouttelettes.
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