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1. WO2020091924 - NANOPORE FLOW CELLS AND METHODS OF FABRICATION

Publication Number WO/2020/091924
Publication Date 07.05.2020
International Application No. PCT/US2019/053546
International Filing Date 27.09.2019
IPC
G01N 33/487 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/-G01N31/131
48Biological material, e.g. blood, urine; Haemocytometers
483Physical analysis of biological material
487of liquid biological material
B81B 1/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
1Devices without movable or flexible elements, e.g. microcapillary devices
B81C 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
3Assembling of devices or systems from individually processed components
CPC
G01N 33/48721
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
48Biological material, e.g. blood, urine
483Physical analysis of biological material
487of liquid biological material
48707by electrical means
48721Investigating individual macromolecules, e.g. by translocation through nanopores
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • JOHNSON, Joseph R.
  • QUON, Roger
Agents
  • VER STEEG, Steven H.
  • DOUGHERTY, Chad M.
Priority Data
16/573,54017.09.2019US
62/752,04529.10.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NANOPORE FLOW CELLS AND METHODS OF FABRICATION
(FR) CELLULES DE SÉQUENÇAGE PAR NANOPORES ET PROCÉDÉS DE FABRICATION
Abstract
(EN)
Nanopore flow cells and methods of manufacturing thereof are provided herein. In one embodiment a method of forming a flow cell includes forming a multi-layer stack on a first substrate. The multi-layer stack features g a membrane layer disposed on the first substrate and a material layer disposed on the membrane layer, the membrane layer having a first opening formed therethrough. The method further includes patterning a surface of a second substrate to form a second opening therein, bonding the patterned surface of the second substrate to a surface of the multi-layer stack, thinning the first substrate, and removing the thinned first substrate and at least portions of the material layer to expose opposite surfaces of the membrane layer.
(FR)
La présente invention concerne des cellules de séquençage (flow-cells) par nanopores et leurs procédés de fabrication. Dans un mode de réalisation, un procédé de formation d'une cellule de séquençage comprend la formation d'un empilement multicouche sur un premier substrat. L'empilement multicouche comprend une couche de membrane disposée sur le premier substrat et une couche de matériau disposée sur la couche de membrane, la couche de membrane ayant une première ouverture formée à travers celle-ci. Le procédé comprend en outre la formation d'un motif sur une surface d'un second substrat pour former une seconde ouverture à l'intérieur de celui-ci, la liaison de la surface à motifs du second substrat à une surface de l'empilement multicouche, l’amincissement du premier substrat, et le retrait du premier substrat aminci et au moins des parties de la couche de matériau pour exposer des surfaces opposées de la couche de membrane.
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Latest bibliographic data on file with the International Bureau