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1. WO2020091445 - POLYMER CONTAINING PHOTOACID GENERATOR

Publication Number WO/2020/091445
Publication Date 07.05.2020
International Application No. PCT/KR2019/014567
International Filing Date 31.10.2019
IPC
C08F 232/02 2006.01
CCHEMISTRY; METALLURGY
08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
232Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
02having no condensed rings
C08F 8/34 2006.01
CCHEMISTRY; METALLURGY
08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
8Chemical modification by after-treatment
34Introducing sulfur atoms or sulfur-containing groups
G03F 7/039 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004Photosensitive materials
039Macromolecular compounds which are photodegradable, e.g. positive electron resists
Applicants
  • 주식회사 엘지화학 LG CHEM, LTD. [KR]/[KR]
Inventors
  • 김지혜 KIM, Jihye
  • 전성호 CHUN, Sung Ho
  • 임민영 LIM, Minyoung
Agents
  • 정순성 CHUNG, Soon-Sung
Priority Data
10-2018-013189131.10.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) POLYMER CONTAINING PHOTOACID GENERATOR
(FR) GÉNÉRATEUR DE PHOTOACIDE CONTENANT UN POLYMÈRE
(KO) 광산발생기를 포함하는 중합체
Abstract
(EN)
The present invention relates to a polymer containing a photoacid generator.
(FR)
La présente invention concerne un polymère contenant un générateur de photoacide.
(KO)
본 발명은 광산발생기를 포함하는 중합체에 관한 것이다.
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