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1. WO2020089333 - HUMIDITY SENSOR INCORPORATING AN OPTICAL WAVEGUIDE

Publication Number WO/2020/089333
Publication Date 07.05.2020
International Application No. PCT/EP2019/079731
International Filing Date 30.10.2019
IPC
G01N 21/552 2014.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
552Attenuated total reflection
G01N 25/68 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analysing materials by the use of thermal means
56by investigating moisture content
66by investigating dew-point
68by varying the temperature of a condensing surface
G01N 21/81 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
77by observing the effect on a chemical indicator
78producing a change of colour
81Indicating humidity
CPC
G01N 21/552
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
55Specular reflectivity
552Attenuated total reflection
G01N 21/81
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
77by observing the effect on a chemical indicator
78producing a change of colour
81Indicating humidity
G01N 25/68
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analyzing materials by the use of thermal means
56by investigating moisture content
66by investigating dew-point
68by varying the temperature of a condensing surface
Applicants
  • AMS AG [AT]/[AT]
Inventors
  • JESSENIG, Stefan
  • SIDOROV, Victor
Agents
  • MARKS & CLERK LLP
Priority Data
62/754,19501.11.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) HUMIDITY SENSOR INCORPORATING AN OPTICAL WAVEGUIDE
(FR) CAPTEUR D'HUMIDITÉ INCORPORANT UN GUIDE D'ONDE OPTIQUE
Abstract
(EN)
A humidity sensor system (10) includes a monolithically integrated semiconductor device (12). The monolithically integrated semiconductor device (12) includes an optical waveguide (14), a thermo-electric cooling device (16), a temperature measurement probe (18), and control circuitry (26) operable to cause the thermo-electric cooling device (16) to adjust a temperature of the monolithically integrated semiconductor device (12). The optical waveguide (14) is operable to receive an input optical signal from a light source (20) and to provide an output optical signal for sensing by a light detector (22). The humidity sensor system (10) further includes processing circuitry operable to receive output signals from the light detector (22) and from the temperature measurement probe (18) and operable to determine a relative humidity based on the output signals from the light detector (22) and the temperature measurement probe (18).
(FR)
L'invention concerne un système de capteur d'humidité (10) comprenant un dispositif à semi-conducteur intégré de façon monolithique (12). Le dispositif à semi-conducteur intégré de façon monolithique comprend un guide d'ondes optique (14), un dispositif de refroidissement thermoélectrique (16), une sonde de mesure de température (18) et des circuits de commande (26) actionnables permettant de provoquer le réglage par le dispositif de refroidissement thermoélectrique (16) d'une température du dispositif à semi-conducteur intégré de façon monolithique (12). Le guide d'ondes optique (14) est conçu pour recevoir un signal optique d'entrée en provenance d'une source de lumière (20) et pour fournir un signal optique de sortie destiné à une détection par un détecteur de lumière (22). Le système de capteur d'humidité (10) comprend en outre un circuit de traitement conçu pour recevoir des signaux de sortie en provenance du détecteur de lumière (22) et de la sonde de mesure de température (18) et conçu pour déterminer une humidité relative en fonction des signaux de sortie en provenance du détecteur de lumière (22) et de la sonde de mesure de température (18).
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