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1. WO2020072712 - SYSTEM, METHOD AND APPARATUS FOR ULTRASONIC INSPECTION

Publication Number WO/2020/072712
Publication Date 09.04.2020
International Application No. PCT/US2019/054394
International Filing Date 03.10.2019
IPC
G01N 29/28 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
28providing acoustic coupling
G01N 29/04 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
G01N 29/24 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
G01N 29/265 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
26Arrangements for orientation or scanning
265by moving the sensor relative to a stationary material
G01N 29/22 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
CPC
G01N 29/04
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
G01N 29/0681
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
06Visualisation of the interior, e.g. acoustic microscopy
0654Imaging
0681by acoustic microscopy, e.g. scanning acoustic microscopy
G01N 29/22
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
G01N 29/223
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
223Supports, positioning or alignment in fixed situation
G01N 29/24
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
24Probes
G01N 29/265
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details ; , e.g. general constructional or apparatus details
26Arrangements for orientation or scanning ; by relative movement of the head and the sensor
265by moving the sensor relative to a stationary material
Applicants
  • SONIX, INC. [US]/[US]
Inventors
  • KWON, Young-Shin
  • MCKEON, James Christopher Patrick
  • KEETON, Paul Ivan John
  • WRIGHT, Michael Lemley
Agents
  • LEVEQUE, Renee' Michelle
Priority Data
62/741,97305.10.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEM, METHOD AND APPARATUS FOR ULTRASONIC INSPECTION
(FR) SYSTÈME, PROCÉDÉ ET APPAREIL D'INSPECTION ULTRASONORE
Abstract
(EN)
A coupler and a chuck are described. The chuck is configured to secure an article while the wafer is undergoing an inspection process. The chuck has a plurality of vacuum areas. Some vacuum areas hold the wafer in place while other vacuum areas suction couplant from the edge surface of the wafer. The coupler is used to inspect a surface and subsurface of the wafer for defects and includes a sensing device, which may be a transducer. One or more couplant inlet couplings are disposed on a second portion of the coupler, the couplant inlet couplings provide a couplant to a portion of the wafer inspected by the sensing device. A plurality of vacuum inlet couplings is disposed on a third portion of the coupler. At least one of the vacuum inlet couplings provide suction through a recessed portion of a lower surface of the coupler to remove couplant that is outside the portion of the wafer that is being inspected by the sensing device.
(FR)
L'invention concerne un accessoire de couplage et un mandrin. Le mandrin est conçu pour fixer un article pendant que la tranche est soumise à un processus d'inspection. Le mandrin comprend une pluralité de zones sous vide. Certaines zones sous vide maintiennent la tranche en place pendant que d'autres zones sous vide aspirent un agent couplant de la surface de bord de la tranche. L'accessoire de couplage est utilisé pour inspecter une surface et une sous-surface de la tranche afin de détecter des défauts et comprend un dispositif de détection pouvant être un transducteur. Un ou plusieurs couplages d'entrée d'agent couplant sont disposés sur une deuxième partie de l'accessoire de couplage, les couplages d'entrée d'agent couplant fournissant un agent couplant à une partie de la tranche inspectée par le dispositif de détection. Une pluralité de couplages d'entrée de vide sont disposés sur une troisième partie du coupleur. Au moins un des couplages d'entrée de vide fournit une aspiration à travers une partie évidée d'une surface inférieure de l'accessoire de couplage afin d'éliminer l'agent couplant situé à l'extérieur de la partie de la tranche inspectée par le dispositif de détection.
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