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1. WO2020071716 - SPECIMEN INSPECTION APPARATUS AND SPECIMEN INSPECTION METHOD

Publication Number WO/2020/071716
Publication Date 09.04.2020
International Application No. PCT/KR2019/012782
International Filing Date 01.10.2019
IPC
G01N 21/3581 2014.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
C03C 17/23 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating
22with other inorganic material
23Oxides
CPC
C03C 17/23
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
CCHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
17Surface treatment of glass, not in the form of fibres or filaments, by coating
22with other inorganic material
23Oxides
G01N 21/3581
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
Applicants
  • 한양대학교 산학협력단 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY [KR]/[KR]
Inventors
  • 김학성 KIM, Hak Sung
  • 오경환 OH, Gyung Hwan
  • 박동운 PARK, Dong Woon
Agents
  • 특허법인 아이피에스 IPS PATENT FIRM
Priority Data
10-2018-011785802.10.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) SPECIMEN INSPECTION APPARATUS AND SPECIMEN INSPECTION METHOD
(FR) APPAREIL D'INSPECTION D'ÉCHANTILLON ET PROCÉDÉ D'INSPECTION D'ÉCHANTILLON
(KO) 시편 검사 장치 및 시편 검사 방법
Abstract
(EN)
According to an embodiment of a specimen inspection apparatus, the specimen inspection apparatus may comprise: a radiation unit; a reflection unit; a focus adjusting unit; a reception unit; and a control unit. The specimen inspection apparatus may comprise: a radiation unit for emitting a terahertz wave; a reflection unit for changing the path of a terahertz wave emitted from the radiation unit; a focus adjusting unit for forming an irradiation region on a specimen according to the path of the terahertz wave; a reception unit for receiving individual terahertz waves obtained by reflection, by the specimen, of the terahertz wave irradiated onto the first region; and a control unit for controlling the distance between at least two elements among the plurality of elements, and detecting whether the specimen is defective, according to the reflectivity difference between the terahertz waves.
(FR)
L'invention concerne, selon un mode de réalisation, un appareil d'inspection d'échantillon, l'appareil d'inspection d'échantillon pouvant comprendre : une unité de rayonnement; une unité de réflexion; une unité de réglage de mise au point; une unité de réception; et une unité de commande. L'appareil d'inspection d'échantillon peut comprendre : une unité de rayonnement permettant d'émettre une onde térahertz; une unité de réflexion permettant de changer le trajet d'une onde térahertz émise par l'unité de rayonnement; une unité de réglage de mise au point permettant de former une région de rayonnement sur un échantillon en fonction du trajet de l'onde térahertz; une unité de réception permettant la réception des ondes térahertz individuelles obtenues par réflexion, par l'échantillon, de l'onde térahertz émise par rayonnement sur la première région; et une unité de commande permettant de commander la distance entre au moins deux éléments parmi la pluralité d'éléments, et de détecter si l'échantillon est défectueux, en fonction de la différence de réflectivité entre les ondes térahertz.
(KO)
시편 검사 장치에 대한 일 실시 예에 따르면, 상기 시편 검사 장치는 방출부, 반사부, 초점 조정부, 수신부, 및 제어부로 구성될 수 있다. 상기 시편 검사 장치는 테라헤르츠 파를 조사하는 방출부; 상기 방출부에서 조사된 테라헤르츠 파의 경로를 변환시키는 반사부; 상기 테라헤르츠 파의 경로에 따라 시편에 조사 영역을 형성하게 하는 초점 조정부; 상기 제1 영역에 조사된 상기 테라헤르츠 파가 상기 시편에서 각각 반사된 테라헤르츠 파를 수신하는 수신부; 및 상기 복수의 구성 중 적어도 두 개의 구성 사이의 거리를 제어하고, 상기 테라헤르츠 파의 반사도 차이에 따른 상기 시편의 불량 여부를 검출하는 제어부로 구성될 수 있다.
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