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1. WO2020069869 - METHOD FOR PRODUCING SOLAR CELLS, AND SOLAR CELL

Publication Number WO/2020/069869
Publication Date 09.04.2020
International Application No. PCT/EP2019/075005
International Filing Date 18.09.2019
IPC
H01L 31/18 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
CPC
H01L 21/02238
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
02104Forming layers
02107Forming insulating materials on a substrate
02225characterised by the process for the formation of the insulating layer
02227formation by a process other than a deposition process
0223formation by oxidation, e.g. oxidation of the substrate
02233of the semiconductor substrate or a semiconductor layer
02236group IV semiconductor
02238silicon in uncombined form, i.e. pure silicon
H01L 31/02363
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
0236Special surface textures
02363of the semiconductor body itself, e.g. textured active layers
H01L 31/1804
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
1804comprising only elements of Group IV of the Periodic System
H01L 31/1876
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
1876Particular processes or apparatus for batch treatment of the devices
Applicants
  • HANWHA Q CELLS GMBH [DE]/[DE]
Inventors
  • JARZEMBOWSKI, Enrico
  • KAUERT, Maximilian
  • PETERS, Stefan
Agents
  • ADARES PATENT- UND RECHTSANWÄLTE REININGER & PARTNER GMBB
Priority Data
10 2018 124 394.402.10.2018DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) SOLARZELLEN-HERSTELLUNGSVERFAHREN UND SOLARZELLE
(EN) METHOD FOR PRODUCING SOLAR CELLS, AND SOLAR CELL
(FR) PROCÉDÉ DE PRODUCTION DE CELLULE SOLAIRE ET CELLULE SOLAIRE
Abstract
(DE)
Die Erfindung betrifft ein Solarzellen-Herstellungsverfahren, aufweisend folgende Schritte in der angegebenen Reihenfolge: a) Aussetzen eines Wafers (1) einer Atmosphäre aus einem Dotandenpräkursor und einem Inertgas bei einer Temperatur von mind. 700°C, b) Belegen einer Oberfläche des Wafers mit einer Schicht (2) mittels Aussetzens des Wafers (1) einer Atmosphäre aus dem Dotandenpräkursor, dem Inertgas und einem Oxidationsmittel bei einer Temperatur von min. 700°C, welche ein Reaktionsprodukt aus dem Dotandenpräkursor, dem Oxidationsmittel und optional einem Material des Wafers (1) aufweist und als Dotandenquelle für einen in den Wafer (1) einzudiffundierenden Dotanden zur Erzeugung eines Emitters dient, und c) Eintreiben des Dotanden in den Wafer (1) mittels Aussetzens des Wafers (1) einer höheren Temperatur als in Schritt b). Ferner betrifft die Erfindung eine Solarzelle, die oder der nach dem Verfahren erhalten ist.
(EN)
The invention relates to a method for producing solar cells, comprising the following steps in the specified order: a) exposing a wafer (1) to an atmosphere comprising a dopant precursor and an inert gas at a temperature of at least 700°C, b) applying to one surface of the wafer a layer (2) by exposing the wafer (1) to an atmosphere comprising the dopant precursor, the inert gas and an oxidizing agent at a temperature of at least 700°C, which layer comprises a reaction product of the dopant precursor, the oxidizing agent and optionally a material of the wafer (1) and acts as a dopant source for a dopant to be diffused into the wafer (1) to create an emitter, and c) driving the dopant into the wafer (1) by exposing the wafer (1) to a temperature higher than that in step b). The invention further relates to a solar cell obtained by the method according to the invention.
(FR)
L’invention concerne un procédé de production de cellules solaires comprenant les étapes suivantes dans l’ordre donné : a) exposer une plaquette (1) à une atmosphère constituée d’un précurseur dopant et d’un gaz inerte à une température d’au moins 700 °C, b) doter une surface de la plaquette d’une couche (2) par exposition de la plaquette (1) à une atmosphère constituée du précurseur dopant, du gaz inerte et d’un agent oxydant à une température de 700 °C minimum, laquelle couche comporte un produit de réaction à partir du précurseur de dopant, de l’agent oxydant et éventuellement d’un matériau de la plaquette (1) et sert de source de dopant d’un dopant à diffuser dans la plaquette (1) pour produire un émetteur, et c) introduire le dopant dans la plaquette (1) par exposition de la plaquette (1) à une température plus élevée qu’à l’étape b). L’invention concerne en outre une cellule solaire obtenue par le procédé.
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Latest bibliographic data on file with the International Bureau