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1. WO2020069252 - FABRICATION TECHNIQUES AND STRUCTURES FOR GETTERING MATERIALS IN ULTRASONIC TRANSDUCER CAVITIES

Publication Number WO/2020/069252
Publication Date 02.04.2020
International Application No. PCT/US2019/053352
International Filing Date 27.09.2019
IPC
B81B 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B81C 1/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
CPC
A61B 8/4483
AHUMAN NECESSITIES
61MEDICAL OR VETERINARY SCIENCE; HYGIENE
BDIAGNOSIS; SURGERY; IDENTIFICATION
8Diagnosis using ultrasonic, sonic or infrasonic waves
44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
4483characterised by features of the ultrasound transducer
B81B 2201/0271
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0271Resonators; ultrasonic resonators
B81B 7/0038
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems; ; Auxiliary parts of microstructural devices or systems
0032Packages or encapsulation
0035for maintaining a controlled atmosphere inside of the chamber containing the MEMS
0038using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
B81C 1/00158
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00015for manufacturing microsystems
00134comprising flexible or deformable structures
00158Diaphragms, membranes
G10K 11/28
GPHYSICS
10MUSICAL INSTRUMENTS; ACOUSTICS
KSOUND-PRODUCING DEVICES
11Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
18Methods or devices for transmitting, conducting, or directing sound
26Sound-focusing or directing, e.g. scanning
28using reflection, e.g. parabolic reflector
G10K 13/00
GPHYSICS
10MUSICAL INSTRUMENTS; ACOUSTICS
KSOUND-PRODUCING DEVICES
13Cones, diaphragms, or the like, for emitting or receiving sound in general
Applicants
  • BUTTERFLY NETWORK, INC. [US]/[US]
Inventors
  • LIU, Jianwei
  • FIFE, Keith, G.
  • LUTSKY, Joseph
  • MIAO, Lingyun
Agents
  • FRANKLIN, Thomas, A.
  • ALAM, Saad
  • AMUNDSEN, Eric, L.
  • BAKER, C., Hunter
  • BALICH, Jason, W.
Priority Data
62/738,50228.09.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) FABRICATION TECHNIQUES AND STRUCTURES FOR GETTERING MATERIALS IN ULTRASONIC TRANSDUCER CAVITIES
(FR) TECHNIQUES DE FABRICATION ET STRUCTURES DE MATÉRIAUX FILTRES DANS DES CAVITÉS DE TRANSDUCTEUR ULTRASONORE
Abstract
(EN)
A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
(FR)
L'invention concerne un procédé de formation d'un dispositif transducteur ultrasonore consistant à coller une membrane à un substrat de manière à former une cavité scellée entre la membrane et le substrat. Une surface exposée située à l'intérieur de la cavité scellée comprend un matériau filtre qui est électriquement isolé d'une électrode inférieure de la cavité.
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