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1. WO2020068598 - TARGET FORMATION APPARATUS

Publication Number WO/2020/068598
Publication Date 02.04.2020
International Application No. PCT/US2019/052285
International Filing Date 20.09.2019
IPC
H05G 2/00 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
H01L 41/313 2013.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
31Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
312by laminating or bonding of piezo-electric or electrostrictive bodies
313by metal fusing or with adhesives
CPC
H01L 41/313
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
31Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
312by laminating or bonding of piezo-electric or electrostrictive bodies
313by metal fusing or with adhesives
H05G 2/006
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
001X-ray radiation generated from plasma
003being produced from a liquid or gas
006details of the ejection system, e.g. constructional details of the nozzle
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • VASCHENKO, Georgiy Olegovich
Agents
  • MARCELLI, Mark
Priority Data
62/735,42024.09.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TARGET FORMATION APPARATUS
(FR) APPAREIL DE FORMATION DE CIBLE
Abstract
(EN)
A system for an extreme ultraviolet light source includes a capillary tube, the capillary tube including a sidewall extending from a first end to a second end, the sidewall including an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end; an actuator configured to be positioned at the exterior wall of the capillary tube; and an adhesive between the exterior wall and the actuator, the adhesive being configured to mechanically couple the actuator and the capillary tube, wherein the adhesive occupies a volume that remains substantially the same or expands as a result of curing.
(FR)
L'invention concerne un système destiné à une source de lumière ultraviolette extrême comprenant un tube capillaire, le tube capillaire comprenant une paroi latérale s'étendant d'une première extrémité à une seconde extrémité, la paroi latérale comprenant une paroi extérieure et une paroi intérieure, la paroi intérieure délimitant un passage qui s'étend de la première extrémité à la seconde extrémité ; un actionneur conçu pour être positionné au niveau de la paroi extérieure du tube capillaire ; et un adhésif entre la paroi extérieure et l'actionneur, l'adhésif étant conçu pour accoupler mécaniquement l'actionneur et le tube capillaire, l'adhésif occupant un volume qui demeure sensiblement le même ou se dilate suite au durcissement.
Latest bibliographic data on file with the International Bureau