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1. WO2020068107 - SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER

Publication Number WO/2020/068107
Publication Date 02.04.2020
International Application No. PCT/US2018/053383
International Filing Date 28.09.2018
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
CPC
H01J 37/32091
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32091the radio frequency energy being capacitively coupled to the plasma
H01J 37/32155
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32137controlling of the discharge by modulation of energy
32155Frequency modulation
H01J 37/32165
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32137controlling of the discharge by modulation of energy
32155Frequency modulation
32165Plural frequencies
H01J 37/32926
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32917Plasma diagnostics
32926Software, data control or modelling
Applicants
  • LAM RESEARCH CORPORATION [US]/[US]
Inventors
  • BHOWMICK, Ranadeep
  • HOLLAND, John
  • KOZAKEVICH, Felix, Leib
  • JI, Bing
  • MARAKHTANOV, Alexei
Agents
  • PATEL, Nishitkumar, V.
  • PENILLA, Albert, S.
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER
(FR) SYSTÈMES ET PROCÉDÉS POUR OPTIMISATION DE FOURNITURE D'ÉNERGIE À UNE ÉLECTRODE D'UNE CHAMBRE À PLASMA
Abstract
(EN)
A method for optimizing delivery of power to a plasma chamber is described. The method includes dividing each cycle of a low frequency (LF) radio frequency generator (RFG) into multiple time intervals. During each of the time intervals, a frequency offset of a high frequency (HF) RFG is generated for which the delivery of power is maximized. The frequency offsets provide a substantially inverse relationship compared to a voltage signal of the LF RFG for each cycle of the voltage signal. The frequency offsets for the time intervals are multiples of the low frequency. The substantially inverse relationship facilitates an increase in the delivery of power to the electrode. A total range of the frequency offsets from a reference HF frequency over the LF RF cycle depends on a power ratio of power that is supplied by the LF RFG and power that is supplied by the HF RFG.
(FR)
L'invention concerne un procédé d'optimisation de la fourniture d'énergie à une chambre à plasma. Le procédé consiste à diviser chaque cycle d'un générateur radiofréquence (RFG) basse fréquence (LF) en de multiples intervalles de temps. Pendant chacun des intervalles de temps, un décalage de fréquence d'un RFG haute fréquence (HF) est généré pour lequel la fourniture d'énergie est maximisée. Les décalages de fréquence fournissent une relation sensiblement inverse par rapport à un signal de tension de la RFG LF pour chaque cycle du signal de tension. Les décalages de fréquence pour les intervalles de temps sont des multiples de la fréquence basse. La relation sensiblement inverse facilite une augmentation de la fourniture d'énergie à l'électrode. Une plage totale des décalages de fréquence à partir d'une fréquence HF de référence sur le cycle RF LF dépend d'un rapport d'énergie de l'énergie qui est fournie par le RFG LF et de l'énergie qui est fournie par le RFG HF.
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