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1. WO2020068057 - MULTI-COLOR SURFACE INSPECTION SYSTEM, METHOD FOR INSPECTING A SURFACE, AND METHOD FOR CALIBRATING THE MULTI-COLOR SURFACE INSPECTION SYSTEM

Publication Number WO/2020/068057
Publication Date 02.04.2020
International Application No. PCT/US2018/052749
International Filing Date 25.09.2018
IPC
G01N 21/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
G01B 11/25 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. moiré fringes, on the object
CPC
B25J 9/1692
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9Programme-controlled manipulators
16Programme controls
1679characterised by the tasks executed
1692Calibration of manipulator
G01B 11/2509
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. ; one or more lines,; moiré fringes on the object
2509Color coding
G01N 2021/8829
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8806Specially adapted optical and illumination features
8829Shadow projection or structured background, e.g. for deflectometry
G01N 2021/8845
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8806Specially adapted optical and illumination features
8845Multiple wavelengths of illumination or detection
G01N 21/8806
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws or contamination
8806Specially adapted optical and illumination features
Applicants
  • CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH [DE]/[DE]
  • DREW, Schiltz [US]/[US]
  • MING, Li [US]/[US]
Inventors
  • DREW, Schiltz
  • MING, Li
Agents
  • EWERS, Falk
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MULTI-COLOR SURFACE INSPECTION SYSTEM, METHOD FOR INSPECTING A SURFACE, AND METHOD FOR CALIBRATING THE MULTI-COLOR SURFACE INSPECTION SYSTEM
(FR) SYSTÈME D'INSPECTION DE SURFACE MULTICOLORE, PROCÉDÉ D'INSPECTION D'UNE SURFACE, ET PROCÉDÉ D'ÉTALONNAGE DU SYSTÈME D'INSPECTION DE SURFACE MULTICOLORE
Abstract
(EN)
A multi-color system (200) for optically inspecting a surface (210) of a specimen includes a multi -wavelength led array (220) to illuminate the specimen with a multi-color light pattern including simultaneously emitted spatial intensity color image patterns (492, 494, 496), each of which has first areas in which light is emitted with a first light intensity and second areas in which the light is emitted with a second light intensity, the first light intensity being higher than the second light intensity, and corresponding first and second areas in each of the simultaneously emitted spatial intensity color image patterns (492, 494, 496) being phase-shifted relative to each other. A multi-color sensor (230) captures each of the simultaneously emitted spatial intensity color image patterns (492, 494, 496) reflected from the surface (210) of the specimen in a single wavelength- multiplexed sensor image (610), and a data processing apparatus (240) in communication with the multi-color sensor (230) determines properties of the surface (210) based on an evaluation of the single wavelength-multiplexed sensor image (610).
(FR)
L'invention concerne un système multicolore (200) pour inspecter optiquement une surface (210) d'un échantillon qui comprend un réseau de diodes électroluminescentes (220) à longueurs d'onde multiples pour éclairer l'échantillon avec un motif de lumière multicolore comprenant des motifs d'image en couleurs d'intensité spatiale émis simultanément (492, 494, 496), dont chacun présente des premières zones dans lesquelles de la lumière est émise avec une première intensité lumineuse et des secondes zones dans lesquelles la lumière est émise avec une seconde intensité lumineuse, la première intensité lumineuse étant supérieure à la seconde intensité lumineuse, et les première et seconde zones correspondantes dans chacun des motifs d'image en couleurs d'intensité spatiale émis simultanément (492, 494 496) étant déphasées l'une par rapport à l'autre. Un capteur multicolore (230) capture chacun des motifs d'image couleur d'intensité spatiale émis simultanément (492, 494, 496) réfléchis par la surface (210) de l'échantillon dans une seule image de capteur multiplexée en longueur d'onde (610), et un appareil de traitement de données (240) en communication avec le capteur multicolore (230) détermine des propriétés de la surface (210) sur la base d'une évaluation de l'unique image de capteur multiplexée en longueur d'onde (610).
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