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1. WO2020066739 - LAMINATED PIEZOELECTRIC ELEMENT

Publication Number WO/2020/066739
Publication Date 02.04.2020
International Application No. PCT/JP2019/036324
International Filing Date 17.09.2019
IPC
H01L 41/187 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
16Selection of materials
18for piezo-electric or electrostrictive elements
187Ceramic compositions
C04B 35/468 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
46based on titanium oxides or titanates
462based on titanates
465based on alkaline earth metal titanates
468based on barium titanates
H01B 3/12 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
3Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
02mainly consisting of inorganic substances
12ceramics
H01L 41/047 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive elements
047Electrodes
H01L 41/083 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
083having a stacked or multilayer structure
H01L 41/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
09with electrical input and mechanical output
CPC
C04B 35/468
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35Shaped ceramic products characterised by their composition
01based on oxide ceramics
46based on titanium oxides or titanates
462based on titanates
465based on alkaline earth metal titanates
468based on barium titanates
H01B 3/12
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
3Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
02mainly consisting of inorganic substances
12ceramics
H01L 41/047
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive devices
047Electrodes ; or electrical connection arrangements
H01L 41/083
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
083having a stacked or multilayer structure
H01L 41/09
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
09with electrical input and mechanical output ; , e.g. actuators, vibrators
H01L 41/187
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
16Selection of materials
18for piezo-electric or electrostrictive devices ; , e.g. bulk piezo-electric crystals
187Ceramic compositions ; , i.e. synthetic inorganic polycrystalline compounds incl. epitaxial, quasi-crystalline materials
Applicants
  • 株式会社村田製作所 MURATA MANUFACTURING CO., LTD. [JP]/[JP]
Inventors
  • 藤田 章雄 FUJITA, Akio
  • 中村 悠佑 NAKAMURA, Yusuke
  • 林 繁利 HAYASHI, Shigetoshi
  • 川田 慎一郎 KAWADA, Shinichiro
Agents
  • 特許業務法人 安富国際特許事務所 YASUTOMI & ASSOCIATES
Priority Data
2018-18457428.09.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) LAMINATED PIEZOELECTRIC ELEMENT
(FR) ÉLÉMENT PIÉZOÉLECTRIQUE STRATIFIÉ
(JA) 圧電積層素子
Abstract
(EN)
Provided is a laminated piezoelectric element which includes a plurality of ceramic piezoelectric layers, inner electrodes that are formed between the ceramic piezoelectric layers, and an outer electrode that is electrically connected to the inner electrodes, wherein the laminated piezoelectric element is characterized in that the ceramic piezoelectric layers are represented by the compositional formula, {Ba1-xCaxO}mTiO2+αRe2O3+βMgO+γMnO [provided that Re2O3 is at least one selected from the group consisting of Y2O3, Gd2O3, Tb2O3, Dy2O3, Ho2O3, Er2O3, Yb2O3, and La2O3, and α, β, and γ represent molar ratios and satisfy relational expressions (1) to (5)], the ceramic piezoelectric layers comprise 0.2 to 0.8 parts by weight of SiO2 as a secondary component relative to 100 parts by weight of a primary component in the {Ba1-xCaxO}TiO2 raw material used for the ceramic piezoelectric layers, the ceramic piezoelectric layers have remnant polarizations in a specific direction, and the inner electrodes comprise nickel, nickel alloy, copper, or copper alloy.
(FR)
L’invention concerne un élément piézoélectrique stratifié comprenant une pluralité de couches piézoélectriques en céramique, des électrodes internes qui sont formées entre les couches piézoélectriques en céramique, et une électrode externe qui est connectée électriquement aux électrodes internes, dans lequel l'élément piézoélectrique stratifié est caractérisé en ce que les couches piézoélectriques en céramique sont représentées par la formule de composition, {Ba1-xCaxO}mTiO2+αRe2O3+βMgO+γMnO [à condition que Re2O3 soit au moins un élément choisi dans le groupe constitué par Y2O3, Gd2O3, Tb2O3, Dy2O3, Ho2O3, Er2O3, Yb2O3, et La2O3, et α, β, et γ représentent des rapports molaires et satisfont aux expressions relationnelles (1) à (5)], les couches piézoélectriques en céramique comprennent 0,2 à 0,8 parties en poids de SiO2 comme composant secondaire par rapport à 100 parties en poids d'un composant primaire dans la matière première {Ba1-xCaxO}TiO2 utilisée pour les couches piézo-électriques en céramique, les couches piézoélectriques en céramique ont des polarisations résiduelles dans une direction spécifique, et les électrodes internes comprennent du nickel, un alliage de nickel, du cuivre ou un alliage de cuivre.
(JA)
複数の圧電体セラミック層と、前記圧電体セラミック層間に形成された内部電極と、前記内部電極に電気的に接続された外部電極とを備えた圧電積層素子であって、前記圧電体セラミック層が、次の組成式で表わされ、 {Ba1-xCaO}TiO+αRe+βMgO+γMnO [但し、Reは、Y、Gd、Tb、Dy、Ho、Er、Yb及びLaの中から選ばれる少なくとも1種以上であり、α、β及びγはモル比を表わし、関係式(1)~(5)を満たす。]かつ、前記圧電体セラミック層に用いる{Ba1-xCaO}TiO原料中の主成分100重量部に対して、副成分としてのSiOを0.2重量部以上、0.8重量部以下含有しており、前記圧電体セラミック層は一定方向に残留分極を有し、前記内部電極はニッケル、ニッケル合金、銅又は銅合金からなることを特徴とする圧電積層素子。
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