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1. WO2020066415 - THREE-DIMENSIONAL SHAPE INSPECTION DEVICE, THREE-DIMENSIONAL SHAPE INSPECTION METHOD, THREE-DIMENSIONAL SHAPE INSPECTION PROGRAM, AND COMPUTER

Publication Number WO/2020/066415
Publication Date 02.04.2020
International Application No. PCT/JP2019/033279
International Filing Date 26.08.2019
IPC
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 11/25 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. moiré fringes, on the object
G01B 11/30 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G06T 7/00 2017.01
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 11/25
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
25by projecting a pattern, e.g. ; one or more lines,; moiré fringes on the object
G01B 11/30
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G06T 7/00
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
G06T 7/521
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
50Depth or shape recovery
521from laser ranging, e.g. using interferometry; from the projection of structured light
Applicants
  • 株式会社SCREENホールディングス SCREEN HOLDINGS CO., LTD. [JP]/[JP]
Inventors
  • 谷口 和隆 TANIGUCHI, Kazutaka
Agents
  • 振角 正一 FURIKADO, Shoichi
  • 大西 一正 OHNISHI, Kazumasa
Priority Data
2018-17827625.09.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) THREE-DIMENSIONAL SHAPE INSPECTION DEVICE, THREE-DIMENSIONAL SHAPE INSPECTION METHOD, THREE-DIMENSIONAL SHAPE INSPECTION PROGRAM, AND COMPUTER
(FR) DISPOSITIF D'INSPECTION DE FORME TRIDIMENSIONNELLE, PROCÉDÉ D'INSPECTION DE FORME TRIDIMENSIONNELLE, PROGRAMME D'INSPECTION DE FORME TRIDIMENSIONNELLE, ET ORDINATEUR
(JA) 三次元形状検査装置、三次元形状検査方法、三次元形状検査プログラム、コンピュータ
Abstract
(EN)
The present invention precisely determines whether there is a shape defect by distinguishing from an originally existing wall in an object when determining whether there is the shape defect on the basis of the difference between measurement data and non-defective product data. Whether there is a shape defect in an object J is determined on the basis of the difference in a flat region Rf, on the surface of a non-defective product represented by non-defective product data Dr, in which an acute angle θa formed with respect to a Z-axis direction is smaller than a prescribed angle θb, or a wall region Rw parallel to the Z-axis direction is excluded (steps S202, S203, S210). Accordingly, it has become possible to distinguish from an originally existing wall in the object J and then precisely determine whether there is a shape defect.
(FR)
La présente invention permet de déterminer précisément s'il existe un défaut de forme en effectuant une distinction par rapport à une paroi existante à l'origine dans un objet quand il est déterminé qu'il existe ou non le défaut de forme sur la base de la différence entre des données de mesure et des données de produit non défectueux. La présence d'un défaut de forme dans un objet J est déterminée sur la base de la différence dans une région plate Rf, sur la surface d'un produit non défectueux représenté par des données Dr de produit non défectueux, un angle aigu θa formé par rapport à une direction d'axe Z étant inférieur à un angle θb prédéfini ou une région de paroi Rw parallèle à la direction d'axe Z étant exclue (étapes S202, S203, S210). Par conséquent, il est possible de faire une distinction par rapport à une paroi existante à l'origine dans l'objet J, puis de déterminer précisément s'il existe un défaut de forme.
(JA)
計測データと良品データとの間に生じる差分に基づき形状欠陥の有無を判定するにあたり、対象物に本来存在する壁面と区別して、形状欠陥の有無を的確に判定する。良品データDrが示す良品の表面のうち、Z軸方向に対して成す鋭角θaが所定鋭角θbより小さいあるいはZ軸方向に平行な壁面領域Rwを除いた平坦領域Rfにおける差分に基づき、対象物Jにおける形状欠陥の有無が判定される(ステップS202、S203、S210)。したがって、対象物Jに本来存在する壁面と区別して、形状欠陥の有無を的確に判定することが可能となっている。
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