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1. WO2020066411 - SCRIBE HEAD AND SCRIBE DEVICE

Publication Number WO/2020/066411
Publication Date 02.04.2020
International Application No. PCT/JP2019/033258
International Filing Date 26.08.2019
IPC
B28D 5/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
28WORKING CEMENT, CLAY, OR STONE
DWORKING STONE OR STONE-LIKE MATERIALS
5Fine working of gems, jewels, crystals, e.g. of semiconductor material; Apparatus therefor
C03B 33/027 2006.01
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL; SUPPLEMENTARY PROCESSES IN THE MANUFACTURE OR SHAPING OF GLASS, OR OF MINERAL OR SLAG WOOL
33Severing cooled glass
02Cutting or splitting sheet glass; Apparatus or machines therefor
023the sheet being in a horizontal position
027Scoring tool holders; Driving mechanisms therefor
H01L 21/301 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
301to subdivide a semiconductor body into separate parts, e.g. making partitions
CPC
B28D 5/00
BPERFORMING OPERATIONS; TRANSPORTING
28WORKING CEMENT, CLAY, OR STONE
DWORKING STONE OR STONE-LIKE MATERIALS
5Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
C03B 33/027
CCHEMISTRY; METALLURGY
03GLASS; MINERAL OR SLAG WOOL
BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
33Severing cooled glass
02Cutting or splitting sheet glass ; or ribbons; Apparatus or machines therefor
023the sheet ; or ribbon; being in a horizontal position
027Scoring tool holders; Driving mechanisms therefor
Applicants
  • 三星ダイヤモンド工業株式会社 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. [JP]/[JP]
Inventors
  • 中垣 智貴 NAKAGAKI Tomoki
Agents
  • 安田 幹雄 YASUDA MIKIO
Priority Data
2018-18465328.09.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SCRIBE HEAD AND SCRIBE DEVICE
(FR) TÊTE DE TRAÇAGE ET DISPOSITIF DE TRAÇAGE
(JA) スクライブヘッド及びスクライブ装置
Abstract
(EN)
The purpose of the present invention is to prevent a force in an axis crossing direction from being applied to a rod during scribe processing. A scribe head (1) according to the present invention is provided with: a holder holding member (6) that holds a scribing tool (4); an air cylinder (3) that causes the holder holding member (6) to come close to and get away from an object to be processed; and a support body (7) that supports the holder holding member (6) and the air cylinder (3). The air cylinder (3) has a cylinder body (3b) and a shaft body retractable from the cylinder body (3b). The shaft body is configured to be air-sealed to the cylinder body (3b). The holder holding member (6) comes close to the object to be processed when the shaft body moves out from the cylinder body (3b) and gets away from the object to be processed when the shaft body moves back to the cylinder body (3b). The tip of the shaft body and the holder holding member (6) are not connected to each other, and only a force along the longitudinal direction of the shaft body is configured to be transmittable to the holder holding member (6).
(FR)
Le but de la présente invention est d'empêcher une force dans une direction transversale à un axe d'être appliquée à une tige pendant un traitement de traçage. Une tête de traçage (1) selon la présente invention comprend : un élément porte-support (6) qui porte un outil de traçage (4) ; un cylindre pneumatique (3) qui amène l'élément de maintien de support (6) à se rapprocher et s'éloigner d'un objet à traiter ; et un corps de support (7) qui supporte l'élément porte-support (6) et le cylindre pneumatique (3). Le cylindre pneumatique (3) a un corps de cylindre (3b) et un corps d'arbre rétractable à partir du corps de cylindre (3b). Le corps d'arbre est configuré pour être en relation étanche à l'air avec le corps de cylindre (3b). L'élément porte-support (6) se rapproche de l'objet à traiter lorsque le corps d'arbre se déplace hors du corps de cylindre (3b), et s'éloigne de l'objet à traiter lorsque le corps d'arbre recule vers le corps de cylindre (3b). La pointe du corps d'arbre et l'élément porte-support (6) ne sont pas reliés l'un à l'autre, et seule une force parallèle à la direction longitudinale du corps d'arbre est configurée pour être transmissible à l'élément de maintien de support (6).
(JA)
スクライブ加工時にロッドに軸交差方向の力が加わらないようにする。 本発明のスクライブヘッド(1)は、スクライビングツール(4)を保持するホルダ保持材(6)と、ホルダ保持材(6)を被加工物に対して近接離反させるエアシリンダー(3)と、ホルダ保持材(6)及びエアシリンダー(3)を支持する支持体(7)と、を備え、エアシリンダー(3)は、シリンダ本体(3b)と、シリンダ本体(3b)から出退自在とされた軸体を有し、軸体はシリンダ本体(3b)に対してエアシールされる構成を有しており、軸体がシリンダ本体(3b)から進出することで、ホルダ保持材(6)が被加工物に対して近づき、軸体がシリンダ本体(3b)へ退行することで、ホルダ保持材(6)が被加工物から離反するようになっており、軸体の先端とホルダ保持材(6)が非連結とされており、軸体の長手方向に沿った力のみ、ホルダ保持材(6)へ伝達可能に構成されている。
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