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1. WO2020066039 - SUBSTRATE ACCOMMODATION CONTAINER

Publication Number WO/2020/066039
Publication Date 02.04.2020
International Application No. PCT/JP2018/043857
International Filing Date 28.11.2018
Chapter 2 Demand Filed 19.06.2019
IPC
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
B65D 85/30 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
30for articles particularly sensitive to damage by shock or pressure
CPC
B65D 85/30
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
30for articles particularly sensitive to damage by shock or pressure
H01L 21/673
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
Applicants
  • ミライアル株式会社 MIRAIAL CO., LTD. [JP]/[JP]
Inventors
  • 成田 侑矢 NARITA Yuya
  • 井上 忠利 INOUE Tadatoshi
Agents
  • 正林 真之 SHOBAYASHI Masayuki
  • 林 一好 HAYASHI Kazuyoshi
  • 岩池 満 IWAIKE Mitsuru
Priority Data
PCT/JP2018/03645728.09.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE ACCOMMODATION CONTAINER
(FR) CONTENANT DE RÉCEPTION DE SUBSTRAT
(JA) 基板収納容器
Abstract
(EN)
This substrate accommodation container comprises: a container body; a lid that can be attached/detached to/from an opening of the container body, and that can seal off the opening of the container body; and a sealing member that, together with the lid, seals off the opening of the container body. If the supply quantity of a gas supplied to a substrate accommodation space from a space outside of the container body through a supply filter is less than or equal to 22 L per minute, then the airtightness of the substrate accommodation space is increased so that 50% or more of the gas supplied to the substrate accommodation space can be discharged through a discharge filter.
(FR)
La présente invention concerne un contenant de réception de substrat comprenant : un corps de contenant ; un couvercle qui peut être fixé à une ouverture du corps de contenant/en être retiré, et qui peut fermer hermétiquement l'ouverture du corps de contenant ; et un élément d'étanchéité qui, conjointement avec le couvercle, ferme hermétiquement l'ouverture du corps de contenant. Si la quantité d'alimentation d'un gaz amené dans un espace de réception de substrat depuis un espace situé à l'extérieur du corps de contenant en passant par un filtre d'alimentation est inférieure ou égale à 22 l par minute, alors l'étanchéité à l'air de l'espace de réception de substrat est augmentée de façon à pouvoir évacuer, par l'intermédiaire d'un filtre d'évacuation, au moins 50 % du gaz amené dans l'espace de réception de substrat.
(JA)
基板収納容器は、容器本体と、容器本体開口部に対して着脱可能であり、容器本体開口部を閉塞可能な蓋体と、蓋体と共に容器本体開口部を閉塞するシール部材と、を備え、給気用フィルタ部を通して容器本体の外部の空間から基板収納空間へ供給される気体の供給量が毎分22L以下の場合に、基板収納空間へ供給された気体の50%以上の気体を排気用フィルタ部から排気可能に、基板収納空間の気密性が高められた基板収納容器である。
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