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1. WO2020065829 - VAPOR DEPOSITION MASK AND MANUFACTURING METHOD FOR SAME

Publication Number WO/2020/065829
Publication Date 02.04.2020
International Application No. PCT/JP2018/035961
International Filing Date 27.09.2018
IPC
C23C 14/04 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
CPC
C23C 14/04
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 園田 通 SONODA, Tohru
  • 犬塚 真博 INUZUKA, Masahiro
  • 小池 英士 KOIKE, Eiji
Agents
  • 特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK
Priority Data
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) VAPOR DEPOSITION MASK AND MANUFACTURING METHOD FOR SAME
(FR) MASQUE DE DÉPÔT EN PHASE VAPEUR ET SON PROCÉDÉ DE FABRICATION
(JA) 蒸着マスクおよびその製造方法
Abstract
(EN)
A vapor deposition mask (10) is provided with a mask frame (11), a vapor deposition sheet (15), and multiple support sheets. Curved surfaces are provided on the mask frame. At least one end in the longitudinal direction of at least one of the multiple support sheets is curved and fixed to the curved surfaces.
(FR)
L'invention concerne un masque de dépôt en phase vapeur (10) pourvu d'un cadre de masque (11), d'une feuille de dépôt en phase vapeur (15) et de multiples feuilles de support. Des surfaces incurvées sont disposées sur le cadre de masque. Au moins une extrémité dans la direction longitudinale d'au moins l'une des multiples feuilles de support est incurvée et fixée aux surfaces incurvées.
(JA)
蒸着マスク(10)は、マスクフレーム(11)と、蒸着シート(15)と、複数のサポートシートと、を備え、上記マスクフレームには、湾曲面が設けられ、複数のサポートシートのうち少なくとも1つのサポートシートは、その長手方向の少なくとも一方の端部が、上記湾曲面に湾曲して固定されている。
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