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1. WO2020062383 - FLEXIBLE PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND FORMING METHOD THEREFOR, AND FLEXIBLE PMUT ARRAY AND FORMING METHOD THEREFOR

Publication Number WO/2020/062383
Publication Date 02.04.2020
International Application No. PCT/CN2018/112074
International Filing Date 26.10.2018
IPC
H01L 41/08 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
CPC
B06B 1/06
BPERFORMING OPERATIONS; TRANSPORTING
06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, ; e.g.; FOR PERFORMING MECHANICAL WORK IN GENERAL
1Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
02making use of electrical energy
06operating with piezo-electric effect or with electrostriction
H01L 41/08
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
H01L 41/0825
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
0825with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
H01L 41/113
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
113with mechanical input and electrical output ; , e.g. generators, sensors
H01L 41/29
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
29Forming electrodes, leads or terminal arrangements
Applicants
  • 天津大学 TIANJIN UNIVERSITY [CN]/[CN]
Inventors
  • 庞慰 PANG, Wei
  • 孙圣 SUN, Sheng
  • 张孟伦 ZHANG, Menglun
  • 高传海 GAO, Chuanhai
Agents
  • 北京汉智嘉成知识产权代理有限公司 CHINA SMART INTELLECTUAL PROPERTY LTD.
Priority Data
201811139661.728.09.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) FLEXIBLE PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND FORMING METHOD THEREFOR, AND FLEXIBLE PMUT ARRAY AND FORMING METHOD THEREFOR
(FR) TRANSDUCTEUR ULTRASONORE MICRO-USINÉ PIÉZOÉLECTRIQUE (PMUT) FLEXIBLE ET SON PROCÉDÉ DE FORMATION, ET MATRICE DE PMUT FLEXIBLES ET SON PROCÉDÉ DE FORMATION
(ZH) 柔性微型压电超声换能器、阵列及其形成方法
Abstract
(EN)
A flexible piezoelectric micromachined ultrasonic transducer (PMUT), comprising: a flexible substrate (115) and a PMUT four-layer structure (110). The flexible substrate (115) has a cavity (116) at the top, and the depth of the cavity (116) is less than or equal to the thickness of the flexible substrate (115); the PMUT four-layer structure (110) is located on the flexible substrate (115), and the PMUT four-layer structure (110) comprises at least a lower electrode (113), a piezoelectric layer (112), and an upper electrode (111). The flexible PMUT comprises the flexible substrate (115), has good flexibility, and can be widely applied. Also provided are a flexible PMUT array, a forming method for the flexible PMUT, and a forming method for the flexible PMUT array.
(FR)
L'invention concerne un transducteur ultrasonore micro-usiné piézoélectrique (PMUT) flexible, comprenant un substrat flexible (115) et une structure PMUT à quatre couches (110). Le substrat flexible (115) comporte une cavité (116) au niveau de sa partie supérieure, et la profondeur de la cavité (116) est inférieure ou égale à l'épaisseur du substrat flexible (115) ; la structure PMUT à quatre couches (110) est située sur le substrat flexible (115), et la structure PMUT à quatre couches (110) comprend au moins une électrode inférieure (113), une couche piézoélectrique (112) et une électrode supérieure (111). Le PMUT flexible comprend le substrat flexible (115), possède une bonne flexibilité et a une large applicabilité. L'invention concerne également une matrice de PMUT flexibles, un procédé de formation du PMUT flexible et un procédé de formation de la matrice de PMUT flexibles.
(ZH)
一种柔性微型压电超声换能器包括:柔性基底(115)和PMUT四层结构(110),其中:柔性基底(115)的顶部具有空腔(116),空腔(116)的深度小于或者等于柔性基底(115)的厚度;PMUT四层结构(110)位于柔性基底(115)之上,PMUT四层结构(110)至少包括下电极(113)、压电层(112)以及上电极(111)。该柔性微型压电超声换能器具有柔性基底(115),柔韧性佳,应用范围广。还提供柔性微型压电超声换能器阵列以及它们的形成方法。
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