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1. WO2020057900 - METROLOGY SENSOR FOR POSITION METROLOGY

Publication Number WO/2020/057900
Publication Date 26.03.2020
International Application No. PCT/EP2019/072762
International Filing Date 27.08.2019
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
G02B 27/48 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/-G02B26/119
48Laser speckle optics
G02B 21/00 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
Applicants
  • ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors
  • GOORDEN, Sebastianus, Adrianus; NL
  • HUISMAN, Simon, Reinald; NL
  • MATHIJSSEN, Simon, Gijsbert, Josephus; NL
  • PELLEMANS, Henricus, Petrus, Maria; NL
Agents
  • VAN DE VEN, Jan-Piet; NL
Priority Data
18195488.419.09.2018EP
19150245.903.01.2019EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METROLOGY SENSOR FOR POSITION METROLOGY
(FR) CAPTEUR DE MÉTROLOGIE POUR MÉTROLOGIE DE POSITION
Abstract
(EN)
Disclosed is a metrology device (1600) configured to produce measurement illumination comprising a plurality of illumination beams, each of said illumination beams being spatially incoherent or pseudo-spatially incoherent and comprising multiple pupil points in an illumination pupil of the metrology device. Each pupil point in each one of said plurality of illumination beams has a corresponding pupil point in at least one of the other illumination beams of said plurality of illumination beams thereby defining multiple sets of corresponding pupil points, and the pupil points of each set of corresponding pupil points are spatially coherent with respect to each other.
(FR)
L'invention concerne un dispositif de métrologie (1600) conçu pour produire un éclairage de mesure comprenant une pluralité de faisceaux d'éclairage, chacun desdits faisceaux d'éclairage étant spatialement incohérent ou pseudo-spatialement incohérent et comprenant de multiples points de pupille dans une pupille d'éclairage du dispositif de métrologie. Chaque point de pupille dans chaque faisceau de ladite pluralité de faisceaux d'éclairage possède un point de pupille correspondant dans au moins l'un des autres faisceaux d'éclairage de ladite pluralité de faisceaux d'éclairage, définissant ainsi de multiples ensembles de points de pupille correspondants, et les points de pupille de chaque ensemble de points de pupille correspondants sont spatialement cohérents les uns par rapport aux autres.
Latest bibliographic data on file with the International Bureau