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1. WO2020005909 - METHODS FOR PRODUCING A SILICON INGOT THAT INVOLVE MONITORING A MOVING AVERAGE OF THE INGOT NECK PULL RATE

Publication Number WO/2020/005909
Publication Date 02.01.2020
International Application No. PCT/US2019/038933
International Filing Date 25.06.2019
IPC
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
15
Single-crystal growth by pulling from a melt, e.g. Czochralski method
20
Controlling or regulating
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
29
Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
02
Elements
06
Silicon
C30B 15/20 (2006.01)
C30B 29/06 (2006.01)
CPC
C30B 15/203
C30B 29/06
Applicants
  • GLOBALWAFERS CO., LTD. [CN/CN]; No. 8 Industrial East Road 2 Science-Based Industrial Park Hsinchu, TW
Inventors
  • WU, Chun-Sheng; US
  • TSAI, Feng-Chien; US
  • CHEN, Chi-Yung; US
  • SHEU, Yeong-Ming; US
  • TSENG, Hsien-Ta; US
  • LU, Zheng; US
Agents
  • SCHUTH, Richard A.; US
  • VANDER MOLEN, Michael J.; US
  • MUNSELL, Michael G.; US
  • KEPPEL, Nicholas A.; US
  • POLAND, Eric G.; US
  • BUTLER, Christopher H.; US
  • ALLEN, Derick E.; US
  • AMODIO, Lucas M.; US
  • ATKINS, Bruce T.; US
  • BLOCK, Zachary J.; US
  • BRENNAN, Patrick E.; US
  • BROPHY, Richard L.; US
  • COYLE, Patrick J.; US
  • FITZGERALD, Daniel M.; US
  • FLOREK, Erin M.; US
  • GOFF, Christopher M.; US
  • HARPER, James D.; US
  • HARPER, Jesse S.; US
  • HEINEN JR., James M.; US
  • HENSON, James W.; US
  • HILMERT, Laura J.; US
  • HOEKEL, Jennifer E.; US
  • LONGMEYER, Michael H.; US
  • MUELLER, Jacob R.; US
  • RASCHE, Patrick W.; US
  • REESER III, Robert B.; US
  • SNIDER, Josh C.; US
  • THOMAS, Mark A.; US
  • WULLER, Adam R.; US
  • ZEE-CHENG, Brendan R.; US
  • ZYCHLEWICZ, William J.; US
  • MOLLER-JACOBS, Rose L.; US
  • VANENGELEN, Catherine E.; US
  • TRUITT, Tracey S.; US
  • KU, Deborah S.; US
  • SCHNEIDERJOHN, Robert L.; US
  • GOLTERMAN, Robert E.; US
  • VANDER TUIG, Marc W.; US
  • ROSS, Katherine L.; US
  • VANENGELEN, Michael R.; US
  • BEHM, JR., Edward F.; US
  • BENNETT, Rachel; US
  • BRACCIANO, Daniel D.; US
  • CARWIN, Michael W.; US
  • MARTINEZ, Alexandra; US
  • WIERSMA, Zachary; US
Priority Data
16/021,94828.06.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHODS FOR PRODUCING A SILICON INGOT THAT INVOLVE MONITORING A MOVING AVERAGE OF THE INGOT NECK PULL RATE
(FR) PROCÉDÉS DE PRODUCTION D'UN LINGOT DE SILICIUM IMPLIQUANT LA SURVEILLANCE D'UNE MOYENNE MOBILE DE LA VITESSE DE TIRAGE DU COL DE LINGOT
Abstract
(EN)
Methods for producing monocrystalline silicon ingots in which the pull rate during neck growth is monitored are disclosed. A moving average of the pull rate may be calculated and compared to a target moving average to determine if dislocations were not eliminated and the neck is not suitable for producing an ingot main body suspended from the neck.
(FR)
L'invention concerne des procédés de production de lingots de silicium monocristallin dans lesquels la vitesse de traction pendant la croissance du col est surveillée. Une moyenne mobile de la vitesse de traction peut être calculée et comparée à une moyenne mobile cible pour déterminer si des dislocations n'ont pas été éliminées et si le col n'est pas approprié pour produire un corps principal de lingot suspendu à partir du col.
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