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1. WO2020005251 - SWING APPARATUS, METHOD FOR PROCESSING A SUBSTRATE, SWING MODULE FOR RECEIVING A SUBSTRATE FROM A TRANSFER CHAMBER, AND VACUUM PROCESSING SYSTEM


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2018/040004 ZIMR0440PC
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
28 June 2018
Applicant
APPLIED MATERIALS, INC.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01L 21/67 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & keywords: swing apparatus, transfer chamber, vertical, horizontal, orientation, rotation, linear motion

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
KR 10-2013-0023313 A (HITACHI HIGH-TECHNOLOGIES CORPORATION) 07 March 2013 See paragraphs [0060]-[0063], [0095]-[0105] and figures 1-3, 8.
1-17
(2)
A
US 2017-0244070 A1 (APPLIED MATERIALS, INC.) 24 August 2017 See paragraphs [0032]-[0033], [0140]-[0143] and figures 1A-12B.
1-17
(3)
A
US 2015-0034121 A1 (EBARA CORPORATION) 05 February 2015 See paragraphs [0004]-[0006] and figures 14-15.
1-17
(4)
A
JP 2004-031181 A (SONY CORP.) 29 January 2004 See paragraphs [0012]-[0030] and figures 1-2.
1-17
(5)
A
JP 2006-169625 A (SAMSUNG SDI CO., LTD.) 29 June 2006 See paragraphs [0055]-[0063] and figures 2, 11.
1-17
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
KR 10-2013-0023313 A
07 March 2013
CN 101783397 A
CN 101783397 B
CN 102751438 A
JP 2010-138467 A
JP 2010-140840 A
JP 2010-165571 A
JP 5074368 B2
JP 5074429 B2
JP 5167103 B2
KR 10-1296416 B1
KR 10-1296971 B1
KR 10-2010-0069606 A
TW 201044666 A
TW 201336140 A
TW I401832 B
21 July 2010
21 November 2012
24 October 2012
24 June 2010
24 June 2010
29 July 2010
14 November 2012
14 November 2012
21 March 2013
13 August 2013
14 August 2013
24 June 2010
16 December 2010
01 September 2013
11 July 2013
US 2017-0244070 A1
24 August 2017
CN 105917019 A
CN 107201501 A
EP 3102715 A1
JP 2017-506703 A
KR 10-2016-0118251 A
KR 10-2017-0081714 A
TW 201542300 A
TW 201711760 A
TW 201733689 A
TW 201825193 A
TW I611847 B
TW I617364 B
US 9899635 B2
WO 2015-117638 A1
31 August 2016
26 September 2017
14 December 2016
09 March 2017
11 October 2016
12 July 2017
16 November 2015
01 April 2017
01 October 2017
16 July 2018
21 January 2018
11 March 2018
20 February 2018
13 August 2015
US 2015-0034121 A1
05 February 2015
CN 104275317 A
JP 2015-015284 A
JP 2015-023085 A
KR 10-2015-0004751 A
TW 201503256 A
14 January 2015
22 January 2015
02 February 2015
13 January 2015
16 January 2015
JP 2004-031181 A
29 January 2004
None
JP 2006-169625 A
29 June 2006
CN 1789484 A
CN 1789484 B
JP 4331707 B2
KR 10-0583521 B1
KR 10-0583521 B1
KR 10-0603408 B1
KR 10-0671656 B1
KR 10-2006-0068439 A
KR 10-2006-0080465 A
US 2006-0150910 A1
21 June 2006
15 August 2012
16 September 2009
25 May 2006
18 May 2006
20 July 2006
19 January 2007
21 June 2006
10 July 2006
13 July 2006
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
25 March 2019
Date of mailing of the international search report:
25 March 2019
Authorized officer:
CHOI, Sang Won
Telephone No. +82-42-481-8291
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