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1. WO2020005251 - SWING APPARATUS, METHOD FOR PROCESSING A SUBSTRATE, SWING MODULE FOR RECEIVING A SUBSTRATE FROM A TRANSFER CHAMBER, AND VACUUM PROCESSING SYSTEM

International Application Status
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22.02.2020International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
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02.01.2020Initial Publication with ISR( (A1 01/2020))PDF (32p.)PDF (32p.), ZIP(XML + TIFFs)
Search and Examination-Related Documents
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02.01.2020(ISA/237) Written Opinion of the International Searching AuthorityPDF (9p.)PDF (9p.), ZIP(XML + TIFFs), FullText
02.01.2020(ISA/210) International Search ReportPDF (3p.)PDF (3p.), ZIP(XML + TIFFs), FullText
Related Documents on file at the International Bureau
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21.01.2020(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
02.01.2020(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
02.01.2020(RO/105) Notification of the International Application Number and of the International Filing DatePDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
02.01.2020(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
02.01.2020Application Body as FiledPDF (29p.)PDF (29p.), ZIP(XML + TIFFs)
02.01.2020(RO/101) Request formPDF (4p.)
02.01.2020(RO/102) Notification Concerning Payment of Prescribed FeesPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
02.01.2020(ISA/202) Notification of Receipt of Search CopyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)