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1. WO2020005251 - SWING APPARATUS, METHOD FOR PROCESSING A SUBSTRATE, SWING MODULE FOR RECEIVING A SUBSTRATE FROM A TRANSFER CHAMBER, AND VACUUM PROCESSING SYSTEM

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CLAIMS A swing apparatus for moving a substrate to one or deposition sources g a longitudinal axis the swing apparatus a support body for holding the substrate a rotation mechanism couple to the support body for moving the substrate by an angle around a axis to vary the substrate orientation from a transfer or horizontal orientation to a or orientation at a processing area and a linear mechanism coupled to the body for translating substrate relative to the longitudinal axis of the deposition source when the substrate in the processing orientation The swing apparatus of the support figured move the substrate in a linear direction perpendicular to the longitudinal axis of deposition source during the movement from the transfer orientation to the processing orieniafion providing a linear offset between an of substrate adjacent to processing area and the longitudinal of the deposition source The apparatus of any of claims or wherein the mechanism is supported linear motion mechanism swing apparatus of any one of the further a protection unit for deposition sou reducing particles In the processing The swing apparatus of claim wherein protection comprises at least a first bellows and rotation mechanism comprises at least shaft located inside said first bello ws The apparatus accordin to claim wherein the linear motion provided inside first bellows The swing apparatus of claim 4 or wherein the protection comprises at a second bellows element and the linear motion mechanism comprises linear guides located said second bellows The swing of any one of the preceding wherein the support body comprises a susceptor for heating substrate The swing of arty one of the herein rotation mechanism comprises at two spline shaft connection elements and at least two motors The s apparatus of any one of the preceding wherein the substrate is held to support body by A method for processing a substrate holding the substrate on a support moving the substrate relative to a deposition source tor processing the substrate a longitudinal axis the movement of the substrate carried out by an around a rotational axis to vary the substrate orientation fro a transfer or horizontal orientation to a processing or vertical orientation by a rotation mechanism coupled to the support body processing a surface of the substrate with the deposition source and translating the substrate relative to the longitudinal axis of the deposition source when substrate is in the processing orientation by a linear mechanism coupled to the support body The of 1 further moving the substrate a horizontal linear direction perpendicular So the longitudinal axis of the deposition source movement from the transfer orien tation to the processing orientation vice A module for receiving substrate from transfer chamber of a vacuum processing system and for positioning said in a processing of a of the vacuum processing the swing module a vacuum chamber a support body for holding the substrate the vacuum chamber mechanism coupled to the support body the substrate by an angle around a rotational axis to vary the substrate orientation a transfer or horizontal orientation to a processing or vertical orientation a linear motion mechanism coupled to the support body for translating the substrate sideways in relation to the longitudinal of the deposition when the substrate is in the processing orientation A processing system for processing substrate the system at least a chamber including deposition source with a longitudinal for processing the substrate at least a module operatively coupled to the processing for the substrate In a processing area of the processing chamber and a transfer chamber operatively coupled to swing module for moving the substrate to the swing module said swing module a chamber a support body for the substrate within the vacuum chamber a rotation mechanism coupled to support body moving the substrate by an angle around rotational axis vary the substrate orientation from a transfer or horizontal orientation a processing vertical orientation an linear mechanism coupled to the support body for the substrate sideways in relation to the longitudinal ax is of the deposition source when the substrate is in foe processing orientation The system of clai further comprising least a load lock chamber coupled to the transfer The system of any one of claims or wherein transfer chamber a polygonal or circular shape and coupled two or more swing modules The of any one of to wherein deposition source is a vertical linear deposition source or wherein the system further comprises a vertical linear implantation insufficientOCRQuality