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1. (WO2020005203) IN SITU DENSITY CONTROL DURING FABRICATION OF THIN FILM MATERIALS
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2020/005203 International Application No.: PCT/US2018/039349
Publication Date: 02.01.2020 International Filing Date: 25.06.2018
IPC:
B29C 41/52 (2006.01) ,B29C 41/08 (2006.01) ,B29C 41/36 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
41
Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
34
Component parts, details or accessories; Auxiliary operations
52
Measuring, controlling or regulating
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
41
Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
02
for making articles of definite length, i.e. discrete articles
08
Coating a former, core or other substrate by spraying or fluidisation, e.g. spraying powder
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
41
Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
34
Component parts, details or accessories; Auxiliary operations
36
Feeding the material on to the mould, core or other substrate
Applicants:
HALLIBURTON ENERGY SERVICES, INC. [US/US]; 3000 N. Sam Houston Parkway E. Houston, Texas 77032-3219, US
Inventors:
PRICE, James M.; US
LI, Jian; US
Agent:
TUMEY, Corey S.; US
Priority Data:
Title (EN) IN SITU DENSITY CONTROL DURING FABRICATION OF THIN FILM MATERIALS
(FR) RÉGLAGE DE DENSITÉ IN SITU PENDANT LA FABRICATION DE MATÉRIAUX DE FILM MINCE
Abstract:
(EN) A system and method for forming a thin film device. A method may comprise depositing a layer of material on a substrate with a thin film system at a deposition rate, monitoring a density of the layer of material to control the deposition rate, selecting a threshold for the deposition rate for a consistent film density, wherein the threshold is a material density, decreasing the deposition rate when the deposition rate is higher than the threshold, and increasing the deposition rate when the deposition rate is lower than the threshold. A thin film system for fabricating a thin film device may comprise a chamber, a material source contained with the chamber, an electrical component to activate the material source, a substrate holder to support a multilayer stack of materials that form the thin film device, a measurement device, and an information handling system.
(FR) La présente invention concerne un système et un procédé de formation d'un dispositif à film mince. Un procédé peut comprendre les étapes consistant à déposer une couche de matériau sur un substrat avec un système de film mince à un taux de dépôt, surveiller une densité de la couche de matériau pour régler le taux de dépôt, sélectionner un seuil pour le taux de dépôt pour une densité de film constante, le seuil étant une densité de matériau, diminuer le taux de dépôt lorsque le taux de dépôt est supérieur au seuil, et augmenter le taux de dépôt lorsque le taux de dépôt est inférieur au seuil. Un système à film mince pour fabriquer un dispositif à film mince peut comprendre une chambre, une source de matériau contenue dans la chambre, un composant électrique pour activer la source de matériau, un support de substrat pour supporter un empilement multicouche de matériaux qui forment le dispositif à film mince, un dispositif de mesure et un système de traitement d'informations.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)