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1. WO2020004838 - VIBRATION-RESISTANT WHITE LIGHT INTERFERENCE MICROSCOPE AND METHOD FOR REMOVING VIBRATION EFFECT THEREOF

Publication Number WO/2020/004838
Publication Date 02.01.2020
International Application No. PCT/KR2019/007143
International Filing Date 13.06.2019
IPC
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
04
Measuring microscopes
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21
Microscopes
G01B 9/02 (2006.01)
G01B 9/04 (2006.01)
G01B 11/24 (2006.01)
G02B 21/00 (2006.01)
CPC
G01B 11/24
G01B 9/02
G01B 9/04
G02B 21/00
Applicants
  • 케이맥(주) K-MAC [KR/KR]; 대전시 유성구 테크노8로 33 33, Techno 8-ro Yuseong-gu Daejeon 34028, KR
Inventors
  • 이효진 LEE, Hyo-Jin; KR
  • 안승엽 AN, Sung-Yup; KR
Agents
  • 특허법인(유한) 대아 DAE-A INTELLECTUAL PROPERTY CONSULTING; 서울시 강남구 역삼로 123 한양빌딩 3층 3F, Hanyang Bldg., 123 Yeoksam-ro Gangnam-gu Seoul 06243, KR
Priority Data
10-2018-007293325.06.2018KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) VIBRATION-RESISTANT WHITE LIGHT INTERFERENCE MICROSCOPE AND METHOD FOR REMOVING VIBRATION EFFECT THEREOF
(FR) MICROSCOPE À INTERFÉRENCE DE LUMIÈRE BLANCHE RÉSISTANT AUX VIBRATIONS ET PROCÉDÉ D’ÉLIMINATION D’EFFET DE VIBRATION DE CELUI-CI
(KO) 내진동 백색광 간섭현미경 및 그 진동영향 제거방법
Abstract
(EN)
The present invention relates to a vibration-resistant white light interference microscope, and a method for removing a vibration effect thereof. A vibration-resistant white light interference microscope according to one embodiment of the present invention, which includes: a light source unit configured to simultaneously generate a relatively broad spectrum of white light and a relatively narrow spectrum of laser light; a lens unit; and a scan drive unit configured to drive the lens unit, comprises: an interference pattern generating unit configured to make an interference pattern of the white light and an interference pattern of the laser light; an illumination imaging microscope optical unit configured to separate the interference pattern of the white light and the interference pattern of the laser light; a trigger generating unit comprising a photodiode configured to measure the interference pattern of the laser light and an FPGA controller configured to generate a trigger by analyzing the interference pattern of the laser light measured by the photodiode; a high speed camera configured to measure the interference pattern of the white light; and a controller configured to calculate and process measurement information about the interference pattern of the white light measured by the high speed camera.
(FR)
La présente invention concerne un microscope à interférence de lumière blanche résistant aux vibrations et un procédé d’élimination d’un effet de vibration de celui-ci. Un microscope à interférence de lumière blanche résistant aux vibrations selon un mode de réalisation de la présente invention comprend : une unité de source de lumière configurée pour générer simultanément un spectre relativement large de lumière blanche et un spectre relativement étroit de lumière laser ; une unité d’objectif ; et une unité d’entraînement de balayage configurée pour entraîner l’unité d’objectif, comprenant : une unité de génération de motif d’interférence configurée pour former un motif d’interférence de la lumière blanche et un motif d’interférence de la lumière laser ; une unité optique de microscope d’imagerie à éclairage configurée pour séparer le motif d’interférence de la lumière blanche et le motif d’interférence de la lumière laser ; une unité de génération de déclencheur comprenant une photodiode configurée pour mesurer le motif d’interférence de la lumière laser et un dispositif de commande FPGA configuré pour générer un déclencheur par analyse du motif d’interférence de la lumière laser mesurée par la photodiode ; une caméra à grande vitesse configurée pour mesurer le motif d’interférence de la lumière blanche ; et un dispositif de commande configuré pour calculer et traiter des informations de mesure concernant le motif d’interférence de la lumière blanche mesurée par la caméra à grande vitesse.
(KO)
본 발명은 내진동 백색광 간섭현미경 및 그 진동영향 제거방법에 관한 것으로, 본 발명의 일 실시예에 따른 내진동 백색광 간섭현미경은, 상대적으로 넓은 스펙트럼의 백색광과 상대적으로 좁은 스펙트럼의 레이저광을 동시에 발생시키는 광원부, 렌즈부와, 상기 렌즈부를 구동하는 스캔 구동부를 포함하며, 상기 백색광의 간섭무늬 및 상기 레이저광의 간섭무늬를 만드는 간섭무늬 생성부, 상기 백색광의 간섭무늬 및 상기 레이저광의 간섭무늬를 분리시키는 조명 결상 현미경 광학부, 상기 레이저광의 간섭무늬를 측정하는 포토 다이오드와, 상기 포토 다이오드에서 측정된 상기 레이저광의 간섭무늬를 분석하여 트리거를 생성하는 FPGA 컨트롤러를 포함하는 트리거 발생부, 상기 백색광의 간섭무늬를 측정하는 고속 카메라, 및 상기 고속 카메라에서 측정된 상기 백색광의 간섭무늬 측정 정보를 연산 및 처리하는 제어부를 포함한다.
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