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1. WO2020004572 - SUBSTRATE-CONVEYING DEVICE AND METHOD FOR OPERATING SAME

Publication Number WO/2020/004572
Publication Date 02.01.2020
International Application No. PCT/JP2019/025667
International Filing Date 27.06.2019
IPC
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15
Gripping heads
08
having finger members
H01L 21/677 (2006.01)
B25J 15/08 (2006.01)
CPC
B25J 15/08
H01L 21/677
Applicants
  • 川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP/JP]; 兵庫県神戸市中央区東川崎町3丁目1番1号 1-1, Higashikawasaki-cho 3-chome, Chuo-ku, Kobe-shi, Hyogo 6508670, JP
Inventors
  • 福島 崇行 FUKUSHIMA, Takayuki; --
  • 木下 真也 KINOSHITA, Shinya; --
  • 松岡 翔吾 MATSUOKA, Shogo; --
  • 岡田 拓之 OKADA, Hiroyuki; --
Agents
  • 特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE; 兵庫県神戸市中央区東町123番地の1 貿易ビル3階 3rd Fl., Bo-eki Bldg., 123-1, Higashimachi, Chuo-ku, Kobe-shi, Hyogo 6500031, JP
Priority Data
2018-12525329.06.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE-CONVEYING DEVICE AND METHOD FOR OPERATING SAME
(FR) DISPOSITIF DE TRANSPORT DE SUBSTRAT ET SON PROCÉDÉ DE FONCTIONNEMENT
(JA) 基板搬送装置及びその運転方法
Abstract
(EN)
This substrate-conveying device comprises: a manipulator (30); a substrate-gripping hand (20); an actuator (40) that rotates the substrate-gripping hand (20) around a roll axis; and a control device (110) configured so as to execute (A) in which the manipulator (30) is operated so that a substrate (10) is held by a first engagement member (51) and a second engagement member (52) of the substrate-gripping hand (20), and after (A), (B) in which the actuator (40) is operated so that a first main surface (10A) of the substrate (10) is positioned above the base member (50), and the normal line of the first main surface (10A) faces below a horizontal surface (H), and (C) in which a movable guide member (60) is moved to the tip part side of the base member (50), and the substrate (10) is gripped by the second engagement member (52), a third engagement member (53), and the movable guide member (60).
(FR)
L'invention concerne un dispositif de transport de substrat comprenant : un manipulateur (30) ; une main de préhension de substrat (20) ; un actionneur (40) qui fait tourner la main de préhension de substrat (20) autour d'un axe de rouleau ; et un dispositif de commande (110) configuré de façon à exécuter (A) dans laquelle le manipulateur (30) est actionné de telle sorte qu'un substrat (10) est maintenu par un premier élément de mise en prise (51) et un second élément de mise en prise (52) de la main de préhension de substrat (20), et après (A), (B) dans laquelle l'actionneur (40) est actionné de telle sorte qu'une première surface principale (10A) du substrat (10) est positionnée au-dessus de l'élément de base (50), et la ligne normale de la première surface principale (10A) est tournée au-dessous d'une surface horizontale (H), et (C) dans laquelle un élément de guidage mobile (60) est déplacé vers le côté partie pointe de l'élément de base (50), et le substrat (10) est saisi par le second élément de mise en prise (52), un troisième élément de mise en prise (53), et l'élément de guidage mobile (60).
(JA)
マニピュレータ(30)と、基板把持ハンド(20)と、基板把持ハンド(20)をロール軸回りに回転させるアクチュエータ(40)と、基板(10)を基板把持ハンド(20)の第1係合部材(51)と第2係合部材(52)で保持するように、マニピュレータ(30)を動作させる(A)と、(A)の後、基板(10)の第1主面(10A)がベース部材(50)よりも上方に位置し、かつ、第1主面(10A)の法線が水平面(H)よりも下方を向くように、アクチュエータ(40)を動作させる(B)と、可動ガイド部材(60)がベース部材(50)の先端部側に移動して、第2係合部材(52)と第3係合部材(53)と可動ガイド部材(60)で基板(10)を把持させる(C)と、を実行するように構成されている、制御装置(110)と、を備える、基板搬送装置。
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