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1. WO2020002007 - ARC SOURCE SYSTEM FOR A CATHODE

Publication Number WO/2020/002007
Publication Date 02.01.2020
International Application No. PCT/EP2019/065703
International Filing Date 14.06.2019
IPC
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
34
operating with cathodic sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
32
by explosion; by evaporation and subsequent ionisation of the vapours
H01J 37/32 (2006.01)
H01J 37/34 (2006.01)
C23C 14/32 (2006.01)
CPC
C23C 14/325
H01J 37/32055
H01J 37/34
Applicants
  • IMPACT COATINGS AB (PUBL) [SE/SE]; Westmansgatan 29G 582 16 Lindköping, SE
Inventors
  • JOELSSON, Torbjörn; SE
Agents
  • VALEA AB; Box 1098 405 23 Göteborg, SE
Priority Data
1850797-027.06.2018SE
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ARC SOURCE SYSTEM FOR A CATHODE
(FR) SYSTÈME DE SOURCE D'ARC DESTINÉE À UNE CATHODE
Abstract
(EN)
An arc source system, comprising a cooling body (12) and a holder body (3) adapted to be detachably fastened to said cooling body and for holding a cathode body (4), wherein the system comprises a membrane (2) which is arranged between the holder body and a lower portion (14) of said cooling body; and wherein said lower portion (14) of said cooling body is provided with at least one cooling fluid channel (11), and wherein said holder body (3) is provided with an inner fastening arrangement configured to be coupled with a corresponding outer fastening arrangement on a cathode body (4).
(FR)
La présente invention concerne un système de source d'arc, consistant en un corps de refroidissement (12) et un corps de maintien (3) apte à être fixé de manière détachable audit corps de refroidissement et destiné à maintenir un corps de cathode (4), le système consistant en une membrane (2) qui est disposée entre le corps de maintien et une partie inférieure (14) dudit corps de refroidissement ; et ladite partie inférieure (14) dudit corps de refroidissement étant pourvue d'au moins un canal de fluide de refroidissement (11) et ledit corps de maintien (3) étant pourvu d'un système de fixation interne conçu pour être accouplé à un système de fixation externe correspondant sur un corps de cathode (4).
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